Oxide-based three-terminal resistive switching logic devices
Oxide-based three-terminal resistive switching logic devices and methods of fabricating oxide-based three-terminal resistive switching logic devices are described. In a first example, a three-terminal resistive switching logic device includes an active region disposed above a substrate. The active region includes an active oxide material region disposed directly between a metal source region and a metal drain region. The device also includes a gate electrode disposed above the active oxide material region. In a second example, a three-terminal resistive switching logic device includes an active region disposed above a substrate. The active region includes a first active oxide material region spaced apart from a second oxide material region. The device also includes metal input regions disposed on either side of the first and second active oxide material regions. A metal output region is disposed between the first and second active oxide material regions.
1. A three-terminal resistive switching logic device, comprising:
an active region disposed above a substrate, the active region comprising an active oxide material region disposed directly between a metal source region and a metal drain region, wherein the active oxide material region comprises a cationic-based conductive oxide material selected from the group consisting of Li4TiO12, Na β-alumina, and AgGeAsS3 and a gate electrode disposed above the active oxide material region.
2. The three-terminal resistive switching logic device of claim 1 , wherein the gate electrode comprises a gate dielectric layer disposed on the active oxide material region, a work-function electrode layer disposed on the gate dielectric layer, and a gate contact disposed on the work-function electrode layer.
3. The three-terminal resistive switching logic device of claim 1 , further comprising:
a source contact electrically connected to the metal source region; and
a drain contact electrically connected to the metal drain region.
4. The three-terminal resistive switching logic device of claim 1 , wherein the metal source region and the metal drain region comprise a metal selected from the group consisting of palladium (Pd), tungsten (W) and platinum (Pt).
5. A three-terminal resistive switching logic device, comprising:
an active region disposed above a substrate, the active region comprising a first active oxide material region spaced apart from a second oxide material region,
wherein the first active oxide material region and the second oxide material region comprise a cationic-based conductive oxide material selected from the group consisting of Li4TiO12, Na β-alumina, and AgGeAsS3;
metal input regions disposed on either side of the first and second active oxide material regions; and
a metal output region disposed between the first and second active oxide material regions.
6. The three-terminal resistive switching logic device of claim 5 , further comprising:
input terminals electrically connected to the metal input regions; and
an output terminal electrically connected to the metal output region.
7. The three-terminal resistive switching logic device of claim 5 , wherein the metal input regions and the metal output region comprise a metal selected from the group consisting of palladium (Pd), tungsten (W) and platinum (Pt).
8. A three-terminal resistive switching logic device, comprising:
a first vertical active region disposed above a first metal line, the first vertical active region comprising a first portion of a metal output region disposed on a first active oxide material region disposed on a first metal input region disposed on the first metal line;
a second vertical active region disposed above a second metal line co-planar with the first metal line, the second vertical active region comprising a second portion of the metal output region disposed on a second active oxide material region disposed on a second metal input region disposed on the second metal line,
wherein the first active oxide material region and the second oxide material region comprise a cationic-based conductive oxide material selected from the group consisting of Li4TiO12, Na β-alumina, and AgGeAsS3; and
a third metal line disposed on and electrically connecting the first and second portions of the metal output region.
9. The three-terminal resistive switching logic device of claim 8 , wherein the first and second metal input regions and the first and second portions of the metal output region comprise a metal selected from the group consisting of palladium (Pd), tungsten (W) and platinum (Pt).
10. A three-terminal resistive switching logic device, comprising: a first vertical active region disposed above a first metal line, the first vertical active region comprising a first portion of a metal output region disposed on a first active oxide material region disposed on a first metal input region disposed on the first metal line;
a second metal line disposed on the first portion of the metal output region; a second vertical active region disposed above the second metal line, the second vertical active region comprising a second metal input region disposed on a second active oxide material region disposed on a second portion of the metal output region disposed on the second metal line,
wherein the first active oxide material region and the second oxide material region comprise a cationic-based conductive oxide material selected from the group consisting of Li4TiO12, Na β-alumina, and AgGeAsS3; and a third metal line disposed on the second metal input region.
11. The three-terminal resistive switching logic device of claim 10 , wherein the first and second metal input regions and the first and second portions of the metal output region comprise a metal selected from the group consisting of palladium (Pd), tungsten (W) and platinum (Pt).