Semiconductor device
According to one embodiment, a semiconductor device includes a first element portion. The first element portion includes first and second semiconductor layers, first, second and third electrodes, and a first insulating layer. The first semiconductor layer includes Al x1 Ga 1-x1 N (0≤x1<1). The first electrode is separated from the first semiconductor layer. The first electrode includes a polycrystal of a nitride of one of Al or B. The second semiconductor layer includes Al x2 Ga 1-x2 N (x1<x2<1). The second semiconductor layer includes first to third regions. The first region is positioned between the second and third regions. The first region is provided between the first semiconductor layer and the first electrode. The first insulating layer is provided between the first region and the first electrode. The second electrode is electrically connected to the second region. The third electrode is electrically connected to the third region.
1. A semiconductor device, comprising:
a first element portion including
a first semiconductor layer including Al x1 Ga 1-x1 N (0≤x1<1),
a first electrode separated from the first semiconductor layer in a first direction, the first electrode being positioned in the [000-1] direction of the first semiconductor layer, and the first electrode including at least one selected from the group consisting of a polycrystal of a nitride of Al and a polycrystal of a nitride of B,
a second semiconductor layer including Al x2 Ga 1-x2 N (x1<x2<1), the second semiconductor layer including first to third regions, the first region being positioned between the second region and the third region in a second direction crossing the first direction, the first region being provided between the first semiconductor layer and the first electrode,
a first insulating layer provided between the first region and the first electrode,
a second electrode electrically connected to the second region, and
a third electrode electrically connected to the third region; and
a second element portion including
a third semiconductor layer including Al x3 Ga 1-x3 N (0≤x3<1),
a fourth electrode separated from the third semiconductor layer in a third direction, the fourth electrode being positioned in the [0001] direction of the third semiconductor layer, and the fourth electrode including at least one selected from the group consisting of a polycrystal of a nitride of Al and a polycrystal of a nitride of B,
a fourth semiconductor layer including Al x4 Ga 1-x4 N (x3<x4<1), the fourth semiconductor layer including fourth to sixth regions, the fourth region being positioned between the fifth region and the sixth region in a fourth direction crossing the third direction, the fourth region being provided between the third semiconductor layer and the fourth electrode,
a second insulating layer provided between the fourth region and the fourth electrode,
a fifth electrode electrically connected to the fifth region, and
a sixth electrode electrically connected to the sixth region.
2. The device according to claim 1 , wherein the first electrode includes at least one first element selected from the group consisting of Si, Ge, C, and O.
3. The device according to claim 2 , wherein a concentration of the first element of the first electrode is not less than 10 15 cm −3 and not more than 10 22 cm −3 .
4. The device according to claim 1 , wherein the first insulating layer includes at least one selected from the group consisting of silicon oxide, magnesium oxide, aluminum oxide, silicon nitride, aluminum nitride, and boron nitride.
5. The device according to claim 1 , wherein the first insulating layer includes
a first insulating film including a nitride, and
a second insulating film provided between the first insulating film and the first electrode, the second insulating film including an oxide.
6. The device according to claim 3 , wherein
the first insulating film includes at least one selected from the group consisting of silicon nitride, aluminum nitride, and boron nitride, and
the second insulating film includes at least one selected from the group consisting of silicon oxide, aluminum oxide, zirconium oxide, and magnesium oxide.
7. The device according to claim 1 , wherein
x1 is 0.01 or less, and
x2 is not less than 0.1 and not more than 0.4.
8. The device according to claim 1 , wherein the second semiconductor layer contacts the first semiconductor layer.
9. The device according to claim 1 , wherein the first element portion has a normally-off operation.
10. The device according to claim 1 , wherein the fourth electrode includes at least one second element selected from the group consisting of Mg, Be, Zn, and C.
11. The device according to claim 10 , wherein a concentration of the second element of the fourth electrode is not less than 10 15 cm −3 and not more than 10 22 cm −3 .
12. The device according to claim 1 , wherein the second insulating layer includes at least one selected from the group consisting of silicon oxide, magnesium oxide, aluminum oxide, silicon nitride, aluminum nitride, and boron nitride.
13. The device according to claim 1 , wherein the second insulating layer includes
a third insulating film including a nitride, and
a fourth insulating film provided between the third insulating film and the fourth electrode, the fourth insulating film including an oxide.
14. The device according to claim 13 , wherein
the third insulating film includes at least one selected from the group consisting of silicon nitride, aluminum nitride, and boron nitride, and
the fourth insulating film includes at least one selected from the group consisting of silicon oxide, aluminum oxide, zirconium oxide, and magnesium oxide.
15. The device according to claim 1 , wherein
x3 is 0.01 or less, and
x4 is not less than 0.1 and not more than 0.4.
16. The device according to claim 1 , wherein the fourth semiconductor layer contacts the third semiconductor layer.
17. The device according to claim 1 , wherein the second element portion has a normally-off operation.
18. The device according to claim 1 , further comprising a first interconnect electrically connecting the first electrode to the fourth electrode.