Switching element and method for manufacturing switching element
The present invention provides a non-volatile switching element that can be applied to a programmable-logic wiring changeover switch and in which an electrochemical reaction is used. Of the two electrodes for applying a bias voltage to the variable resistance layer of the non-volatile switching element, the electrode that does not feed metal ions to the variable resistance layer when the switch is in the ON state is made from a ruthenium alloy. The ruthenium alloy includes ruthenium and a metal in which the standard Gibbs energy of forming ΔG when metal ions are generated from the metal is higher in the negative direction than ΔG of ruthenium. As a result, it becomes possible to maintain the low-resistance state in the ON state for a longer period of time without increasing the amount of electrical current required when a switch is made between the ON state and the OFF state.
1. A variable resistance element, comprising:
a first electrode;
a second electrode; and
a variable resistance film located between the electrodes,
wherein the first electrode includes copper, the second electrode is an electrode that is made from an alloy including ruthenium, and the alloy including ruthenium is an alloy of ruthenium and titanium,
wherein ruthenium content rate in the alloy is 70 atm % and a titanium content rate in the alloy is 30 atm %, and
wherein the variable resistance film is an ion conduction layer.
2. The variable resistance element according to claim 1 , wherein the ion conduction layer conducts a metal ion.
3. The variable resistance element according to claim 1 , wherein the ion conduction layer is a polymer layer including at least silicon, oxygen, and carbon as primary components, and
relative permittivity of the polymer including at least silicon, oxygen, and carbon as primary components is not less than 2.1 and not more than 3.0.