Horizontal gate-all-around device having wrapped-around source and drain
View Patent ↗Various semiconductor devices, such as horizontal gate-all-around devices, and methods of fabricating such are disclosed herein. An exemplary semiconductor device includes a fin structure having a channel region disposed between a first source/drain region and a second source/drain region. The fin structure includes a first nanowire and a second nanowire disposed in the channel region, the first source/drain region, and the second source/drain region. The fin structure further includes an epitaxial layer that wraps the first nanowire and the second nanowire in the first source/drain region and the second source/drain region. A gate is disposed over the channel region of the fin structure, such that the gate wraps the first nanowire and the second nanowire in the channel region. In some implementations, the first nanowire, the second nanowire, and the epitaxial layer combine to have a vertical bar-like shape in the first source/drain region and the second source/drain region.
1. A semiconductor device, comprising:
a fin structure having a channel region disposed between a first source/drain region and a second source/drain region, wherein the fin structure includes:
a first nanowire and a second nanowire disposed in the channel region, the first source/drain region, and the second source/drain region, and
an epitaxial layer that wraps the first nanowire and the second nanowire in the first source/drain region and the second source/drain region; and
a gate disposed over the channel region of the fin structure, such that the gate wraps the first nanowire and the second nanowire in the channel region.
2. The semiconductor device of claim 1 , wherein the fin structure is disposed over a substrate, and the fin structure further includes a semiconductor layer disposed in the first source/drain region and the second source/drain region, wherein the semiconductor layer is disposed between the epitaxial layer and the substrate.
3. The semiconductor device of claim 2 , wherein the semiconductor layer is further disposed in the channel region between the gate and the substrate.
4. The semiconductor device of claim 1 , wherein the gate completely fills a space between the first nanowire and the second nanowire, and the epitaxial layer completely fills the space between the first nanowire and the second nanowire in the first source/drain region and the second source/drain region.
5. The semiconductor device of claim 1 , wherein the first nanowire and the second nanowire include a first material and the epitaxial layer includes a second material that is different than the first material.
6. The semiconductor device of claim 1 , wherein the first nanowire, the second nanowire, and the epitaxial layer include a same type of dopant, wherein a concentration of dopant in the epitaxial layer is higher than a concentration of dopant in the first nanowire and the second nanowire.
7. The semiconductor device of claim 6 , wherein the first nanowire and the second nanowire are doped with a first doping species, and the epitaxial layer is doped with a second doping species that is different than the first doping species.
8. The semiconductor device of claim 1 , wherein the epitaxial layer does not merge with an epitaxial layer of an adjacent fin structure.
9. The semiconductor device of claim 1 , wherein the first nanowire, the second nanowire, and the epitaxial layer combine to have a vertical bar-like shape in the first source/drain region and the second source/drain region.
10. The semiconductor device of claim 1 , wherein the first nanowire and the second nanowire have a circular cross-section in the channel region and a rectangular cross-section in the first source/drain region and the second source/drain region.
11. A semiconductor device comprising:
a substrate;
a fin element extending from the substrate, wherein:
the fin element includes a channel region and two source and drain (S/D) regions on opposing sides of the channel region,
the channel region includes channel semiconductor layers spaced from each other, and
the S/D regions each include first semiconductor layers spaced from each other and a second semiconductor layer wrapping around each of the first semiconductor layers; and
a gate stack disposed over the channel region of the fin element and surrounding each of the channel semiconductor layers.
12. The semiconductor device of claim 11 , wherein:
each of the first semiconductor layers includes a first semiconductor material and is substantially dopant-free; and
the second semiconductor layer includes the first semiconductor material and is doped with one of: an n-type dopant and a p-type dopant.
13. The semiconductor device of claim 12 , wherein the second semiconductor layer and the first semiconductor layers are doped with different dopant species.
14. The semiconductor device of claim 11 , wherein:
the second semiconductor layer and the first semiconductor layers are doped with different dopant species; and
the second semiconductor layer has a higher dopant concentration than each of the first semiconductor layers.
15. The semiconductor device of claim 11 , wherein the S/D regions of the fin element each have a vertical bar-like shape.
16. A semiconductor device comprising:
a fin structure disposed over a substrate, the fin structure having a channel region disposed between a first source/drain region and a second source/drain region;
a gate structure disposed over the channel region of the fin structure; and
wherein the fin structure includes:
a first semiconductor layer disposed in the channel region, the first source/drain region, and the second source/drain region, wherein the gate structure surrounds the first semiconductor layer in the channel region,
a second semiconductor layer surrounding the first semiconductor layer in the first source/drain region and the second source/drain region, and
a third semiconductor layer disposed between the gate structure and the substrate in the channel region and between the second semiconductor layer and the substrate in the first source/drain region and the second source/drain region, wherein a width of the third semiconductor layer is substantially the same as a width of the first semiconductor layer.
17. The semiconductor device of claim 16 , wherein the gate structure includes a gate dielectric disposed on the first semiconductor layer and a metal gate stack disposed on the gate dielectric.
18. The semiconductor device of claim 16 , wherein the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer include epitaxially grown semiconductor materials.
19. The semiconductor device of claim 16 , wherein the first semiconductor layer, the second semiconductor layer, and the third semiconductor layer have different dopant characteristics.
20. The semiconductor device of claim 16 , wherein the first semiconductor layer and the second semiconductor layer combine to form vertical bar-shaped source/drain features in the first source/drain region and the second source/drain region.