Method of forming transistors of different configurations
The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device of the present disclosure includes a first source/drain feature and a second source/drain feature over a substrate, a plurality of channel members extending between the first source/drain feature and the second source/drain feature, a gate structure wrapping around each of the plurality of channel members, and at least one blocking feature. At least one of the plurality of channel members is isolated from the first source/drain feature and the second source/drain feature by the at least one blocking feature.
1 . A semiconductor device, comprising:
a first source/drain feature and a second source/drain feature over a substrate;
a first semiconductor nanostructure extending between the first source/drain feature and the second source/drain feature along a direction; and
a gate structure wrapping around the first semiconductor nanostructure; and
wherein, along the direction, the first semiconductor nanostructure is spaced apart from the first source/drain feature or the second source/drain feature by a dielectric blocking layer.
2 . The semiconductor device of claim 1 , wherein the first semiconductor nanostructure is a topmost one of a plurality of semiconductor nanostructures.
3 . The semiconductor device of claim 2 , further comprising:
a first spacer layer disposed over a top surface of the dielectric blocking layer; and
a second spacer layer disposed over the first spacer layer,
wherein the top surface of the dielectric blocking layer is spaced away from the second spacer layer by the first spacer layer.
4 . The semiconductor device of claim 3 , wherein a composition of the first spacer layer is different from a composition of the second spacer layer.
5 . The semiconductor device of claim 3 , wherein a dielectric constant of the first spacer layer is greater than a dielectric constant of the second spacer layer.
6 . The semiconductor device of claim 1 , further comprising:
a second semiconductor nanostructure disposed below the first semiconductor nanostructure and directly sandwiched between the first source/drain feature and the second source/drain feature; and
a plurality of inner spacer features disposed between the gate structure and the first source/drain feature,
wherein a topmost one of the plurality of inner spacer features is disposed between the dielectric blocking layer and the second semiconductor nanostructure.
7 . The semiconductor device of claim 6 , wherein the gate structure is spaced apart from the first source/drain feature by the plurality of inner spacer features.
8 . A semiconductor device, comprising:
a substrate;
a first transistor disposed over the substrate and comprising a first gate structure wrapping around a first number of channel members;
a second transistor disposed over the substrate and comprising a second gate structure wrapping around a second number of channel members;
a third transistor disposed over the substrate and comprising a third gate structure wrapping around a third number of channel members; and
a fourth transistor disposed over the substrate and comprising a fourth gate structure wrapping around a fourth number of channel members,
wherein the first number, the second number, the third number and the fourth number are identical,
wherein the first number of channel members are sandwiched between a first source/drain feature and a second source/drain feature,
wherein one of the second number of channel members is end-caped by first dielectric blocking layers,
wherein two of the third number of channel members are end-capped by second dielectric blocking layers,
wherein three of the fourth number of channel members are end-capped by third dielectric blocking layers.
9 . The semiconductor device of claim 8 ,
wherein an effective channel width of the first transistor is greater than an effective channel width of the second transistor,
wherein the effective channel width of the second transistor is greater than an effective channel width of the third transistor,
wherein the effective channel width of the third transistor is greater than an effective channel width of the fourth transistor.
10 . The semiconductor device of claim 8 , wherein the first number, the second number, the third number, and the fourth number are three.
11 . The semiconductor device of claim 8 , wherein the first dielectric blocking layers, the second dielectric blocking layers, and the third dielectric blocking layers comprise aluminum oxide, zirconium oxide, tantalum oxide, yttrium oxide, titanium oxide, lanthanum oxide, silicon oxide, silicon oxycarbonitride, silicon nitride, silicon oxynitride, or carbon-rich silicon carbonitride.
12 . The semiconductor device of claim 8 , wherein a threshold voltage of the fourth transistor is greater than a threshold voltage of the first transistor, the second transistor, the third transistor, or the fourth transistor.
13 . The semiconductor device of claim 8 ,
wherein the fourth number of channel members are disposed between a third source/drain feature and a fourth source/drain feature by the third dielectric blocking layers,
wherein the fourth gate structure is spaced apart from the third source/drain feature and the fourth source/drain feature by a plurality of inner spacer features,
wherein the third dielectric blocking layers are interleaved by the plurality of inner spacer features.
14 . The semiconductor device of claim 13 , wherein a composition of the plurality of inner spacer features is the same as a composition of the third dielectric blocking layers.
15 . The semiconductor device of claim 13 , wherein the third source/drain feature and the fourth source/drain feature partially extend into the substrate.
16 . A semiconductor device, comprising:
a mesa structure over a substrate;
a plurality of nanostructures disposed over the mesa;
a source/drain feature disposed over the substrate and adjacent the plurality of nanostructures; and
a plurality of dielectric blocking layers sandwiched between and in contact with the plurality of nano structures and the source/drain feature.
17 . The semiconductor device of claim 16 , further comprising:
a gate structure to wrap around each of the plurality of nanostructures.
18 . The semiconductor device of claim 17 , wherein the gate structure comprises:
a gate dielectric layer; and
a metal gate electrode over the gate dielectric layer.
19 . The semiconductor device of claim 17 , wherein the gate structure is spaced apart from the source/drain feature by a plurality of inner spacer features.
20 . The semiconductor device of claim 19 , wherein the plurality of dielectric blocking layers are interleaved by the plurality of inner spacer features.