Semiconductor device
A semiconductor device includes a first substrate, a second substrate, an anti-stiction layer and at least one metal layer. The first substrate includes a microelectromechanical systems (MEMS) structure. The second substrate is bonded to the first substrate and disposed over the MEMS structure. The second substrate comprises at least one through hole. The anti-stiction layer is disposed on a surface of the MEMS structure. The at least one metal layer is disposed over the second substrate and covers the at least one through hole of the second substrate.
1. A method, comprising:
bonding a first substrate to a second substrate, wherein a microelectromechanical systems (MEMS) structure is in a space between the first substrate and the second substrate;
etching the second substrate to form at least one through hole;
forming a first metal layer over the second substrate;
forming an anti-stiction layer on a surface of the MEMS structure and the first metal layer;
removing the anti-stiction layer from the first metal layer by performing a thermal treatment to the first metal layer; and
sealing the at least one through hole of the second substrate.
2. The method of claim 1 , wherein bonding the first substrate to the second substrate comprises:
eutectically bonding the first substrate to the second substrate.
3. The method of claim 1 , wherein forming the anti-stiction layer on the surface of the MEMS structure comprises:
coating a self-assembling monolayer (SAM) on the surface of the MEMS structure.
4. The method of claim 3 , wherein the SAM comprises one of perfluorodecyltrichlorosilane (FDTS), octadecyltrichlorosilane (OTS), dimethyldichlorosilane (DDMS) and fluoro-octyl-trichloro-silane (FOTS).
5. The method of claim 1 , further comprising:
etching the first metal layer to form at least one through hole corresponding to the at least one through hole of the second substrate.
6. The method of claim 5 , wherein sealing the at least one through hole of the second substrate comprises:
forming at least one second metal layer on the first metal layer to seal the at least one through hole of the first metal layer and the at least one through hole of the second substrate.
7. The method of claim 6 , wherein
the thermal treatment to the first metal layer is performed before the at least one second metal layer is formed.
8. The method of claim 6 , wherein the at least one second metal layer comprises Ti, Al—Cu alloy, TiN, or a combination thereof.
9. A method, comprising:
etching a semiconductor structure to form at least one through hole, wherein the semiconductor structure comprises a microelectromechanical systems (MEMS) structure, a first substrate, and a second substrate that is eutectically bonded to the first substrate, wherein etching the semiconductor structure comprises etching a first metal layer that is disposed over the second substrate;
forming an anti-stiction layer on a surface of the MEMS structure and the first metal layer;
removing the anti-stiction layer from the first metal layer by performing a thermal treatment to the etched first metal layer; and
sealing the at least one through hole of the semiconductor structure.
10. The method of claim 9 , wherein forming the anti-stiction layer on the surface of the MEMS structure comprises:
coating a self-assembling monolayer (SAM) on the surface of the MEMS structure by a molecular vapor deposition (MVD) process.
11. The method of claim 10 , wherein the SAM comprises one of perfluorodecyltrichlorosilane (FDTS), octadecyltrichlorosilane (OTS), dimethyldichlorosilane (DDMS) and fluoro-octyl-trichloro-silane (FOTS).
12. The method of claim 9 , wherein etching the semiconductor structure further comprises:
etching the second substrate, to form the at least one through hole.
13. The method of claim 12 , wherein sealing the at least one through hole comprises:
forming at least one second metal layer on the etched first metal layer to seal the at least one through hole.
14. The method of claim 13 , wherein
the thermal treatment to the first metal layer is performed before the at least one second metal layer is formed.
15. A method, comprising:
forming an anti-stiction layer on a surface of a microelectromechanical systems (MEMS) structure via at least one through hole of a semiconductor structure, and on a first metal layer that is disposed over the semiconductor structure; wherein the MEMS structure is located in the semiconductor structure;
removing the anti-stiction layer from the first metal layer by performing a thermal treatment to the semiconductor structure; and
forming at least one metal layer to seal the at least one through hole of the semiconductor structure.
16. The method of claim 15 , wherein forming the anti-stiction layer on the surface of the MEMS structure comprises:
coating a self-assembling monolayer (SAM) on the surface of the MEMS structure by a molecular vapor deposition (MVD) process.
17. The method of claim 16 , wherein the SAM comprises one of perfluorodecyltrichlorosilane (FDTS), octadecyltrichlorosilane (OTS), dimethyldichlorosilane (DDMS) and fluoro-octyl-trichloro-silane (FOTS).
18. The method of claim 15 , wherein the semiconductor structure further comprises a first substrate and a second substrate, the at least one through hole is formed at the second substrate, the MEMS structure is located between the first substrate and the second substrate, and the method further comprises:
eutectically bonding the first substrate and the second substrate.
19. The method of claim 15 , wherein the at least one metal layer comprises titanium (Ti), aluminum copper (Al—Cu) alloy, titanium nitride (TiN), or a combination thereof.
20. The method of claim 15 , wherein
the thermal treatment to the first metal layer is performed before the at least one metal layer is formed.