IP Library › Granted Patent US 10,118,828
Granted Patent B2
US 10,118,828 · App. 15/239,389 · Granted Nov 6, 2018

Tritertbutyl aluminum reactants for vapor deposition

Inventors: Eric J. Shero (Phoenix, AZ); Mohith E. Verghese (Phoenix, AZ)
Assignee: ASM IP HOLDING B.V.
C01B31/305C01B32/921C23C16/32C23C16/45525
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Quick Facts
Patent No.
US 10,118,828
App. No.
15/239,389
Granted
Nov 6, 2018
Kind
B2
Abstract

Aluminum (Al) hydrocarbon precursor compositions are provided that can be used for vapor deposition of transition metal carbide thin films, for example aluminum-doped transition metal carbide thin films such as Al-doped titanium carbide thin films. In some embodiments, the precursor compositions comprise one or more isomers of tritertbutyl aluminum (TTBA). In some embodiments the precursor compositions comprise at least 50% of Isomer 1 of TTBA, at least 50% of Isomer 2 of TTBA, or at least 20% of a combination of Isomer 1 and Isomer 2, where Isomer 1 has the formula Al(tert-Bu) 2 (iso-Bu) and Isomer 2 has the formula Al(tert-Bu)(iso-Bu) 2 . A container containing a precursor composition comprising at least 50% of Isomer 1 or Isomer 2 or at least 20% of a combination of Isomer 1 and 2 of TTBA can be attached to a vapor deposition reactor and used to deposit transition metal carbide thin films such as Al-doped titanium carbide thin films by atomic layer deposition or chemical vapor deposition.

Claims (21)

1. A vapor deposition precursor composition comprising at least 50% Isomer 1, at least 50% Isomer 2, or greater than 20% of a combination of Isomer 1 and Isomer 2 of Al(tert-Bu) 3 (TTBA), wherein Isomer 1 has the formula Al(tert-Bu) 2 (iso-Bu) and Isomer 2 has the formula Al(tert-Bu)(iso-Bu) 2 .

2. The composition of claim 1 comprising at least 70% Isomer 1.

3. The composition of claim 1 comprising at least 80% Isomer 1.

4. The composition of claim 1 comprising at least 70% Isomer 2.

5. The composition of claim 1 comprising greater than 50% of a combination of Isomer 1 and Isomer 2.

6. The composition of claim 1 comprising greater than 80% of a combination of Isomer 1 and Isomer 2.

7. The composition of claim 1 comprising at least 80% Isomer 2.

8. The composition of claim 1 , wherein the composition further comprises Al(tert-Bu) 3 .

9. The composition of claim 1 , wherein the composition does not comprise Isomer 3 wherein Isomer 3 has the formula Al(iso-Bu) 3 .

10. The composition of claim 1 , additionally comprising Isomer 3 of Al(tert-Bu) 3 , wherein Isomer 3 has the formula Al(iso-Bu) 3 .

11. The composition of claim 10 , wherein the composition comprises at most 5% Isomer 3.

12. A container configured to be attached to a deposition reactor, the container comprising a composition comprising at least 50% Isomer 1, at least 50% Isomer 2 or at least 20% of a combination of Isomer 1 and Isomer 2 of Al(tert-Bu) 3 , wherein Isomer 1 has the formula Al(tert-Bu) 2 (iso-Bu) and Isomer 2 has the formula Al(tert-Bu)(iso-Bu) 2 .

13. The container of claim 12 , wherein the composition comprises at least 70% Isomer 1.

14. The container of claim 12 , wherein the composition comprises at least 90% Isomer 1.

15. The container of claim 12 , wherein the composition comprises at least 70% Isomer 2.

16. The container of claim 12 , wherein the composition comprises at least 90% Isomer 2.

17. The container of claim 12 , wherein the composition comprises at least 50% of a combination of Isomer 1 and Isomer 2.

18. The container of claim 12 , wherein the composition comprises at least 80% of a combination of Isomer 1 and Isomer 2.

19. The container of claim 12 , wherein the composition comprises only a combination of Isomer 1 and Isomer 2.

20. The container of claim 12 , wherein the composition additionally comprises Isomer 3 of Al(tert-Bu) 3 , wherein Isomer 3 has the formula Al(iso-Bu) 3 .

21. The container of claim 20 , wherein the composition comprises at most 5% Isomer 3.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2016
From: SHERO, ERIC J.; VERGHESE, MOHITH E.
To: ASM IP HOLDING B.V.
Reel/Frame 040494/0731 →
Continuity (2)
Provisional Application 62236752 · Oct 2, 2015
Related Publication 20170096345A1 · Apr 6, 2017
Cited By (1)
US 12,716,126