High flow gas diffuser assemblies, systems, and methods
Porous diffuser assemblies including multiple diffuser elements. The porous diffuser assemblies include a diffuser body, a diffuser base coupled to the diffuser body and forming a plenum there between, the diffuser base including a plurality of openings formed therein, and a porous diffuser element disposed in each of the plurality of openings wherein surfaces of the porous diffuser elements are exposed to the plenum. Gas purged chambers and methods of purging a chamber are disclosed, as are numerous other aspects.
1. A gas purged chamber, comprising:
a chamber configured to contain a substrate therein; and
a gas diffuser assembly coupled to the chamber, the gas diffuser assembly including:
a diffuser body,
a diffuser base coupled to the diffuser body and forming a gas plenum there between, the diffuser base including a plurality of openings formed therein, and
a porous diffuser element disposed in each of the plurality of openings.
2. The gas purged chamber of claim 1 , wherein the gas diffuser assembly is coupled to a load lock chamber lid.
3. The gas purged chamber of claim 1 , wherein the gas diffuser assembly is coupled to a transfer chamber lid.
4. The gas purged chamber of claim 1 , comprising a plurality of the gas diffuser assembly coupled to a transfer chamber lid.
5. The gas purged chamber of claim 1 , wherein a thickness of the porous diffuser elements is less than a thickness of the diffuser base.
6. The gas purged chamber of claim 1 , a wherein the diffuser base includes transition elements.
7. The gas purge chamber of claim 1 , wherein each of the porous diffuser elements are clamped to the diffuser base by a securing member.
8. The gas purge chamber of claim 1 , wherein the plenum includes a frustoconical surface.
9. The gas purge chamber of claim 1 , wherein the plurality of openings are circular openings configured to receive the porous diffuser elements that are configured to have a disc shape.
10. The gas purge chamber of claim 1 , wherein each of the porous diffuser elements comprises a sintered porous metal welded to the diffuser base.