Test unit
A test unit according to the present invention includes: a first contact probe contacting with an electrode provided on a front surface of one of contact targets, and contacting with an electrode of the other contact target; a second contact probe contacting with an electrode provided on a back surface of the one of contact targets and contacting with an electrode of a substrate; a first probe holder including a suction holder that sucks and holds the one of contact targets, and accommodating and holding therein the first contact probes; a second probe holder accommodating and holding therein the second contact probes; and a base portion, which is layered over the first probe holder and holds the other contact target at a side thereof layered over the first probe holder; and a gap is formed between the other contact target and the first probe holder.
1. A test unit that performs testing of two contact targets, at least of one of which includes electrodes on both sides thereof, the two contact targets being substantially plate shaped and arranged in a layering direction thereof, the test unit comprising:
a first contact probe that comes into contact, at one longitudinal direction end portion side thereof, with an electrode provided on a front surface of one of the contact targets, and comes into contact, at the other end portion side thereof, with an electrode of the other contact target;
a second contact probe that comes into contact, at one longitudinal direction end portion side thereof, with an electrode provided on a back surface of the one of the contact targets, and comes into contact, at the other end portion side thereof, with an electrode of a substrate that outputs a signal for the testing;
a first probe holder including a suction holder that directly sucks and holds the one of the contact targets to the first probe holder and accommodating and holding therein a plurality of the first contact probes according to a predetermined pattern;
a second probe holder accommodating and holding therein a plurality of the second contact probes according to a predetermined pattern; and
a base portion that is layered over the first probe holder and holds, at a side thereof layered over the first probe holder, the other contact target, wherein
a gap is formed between the other contact target and the first probe holder.
2. The test unit according to claim 1 , wherein the base portion includes a flow channel formed therein, through which the gap communicates with outside.
3. The test unit according to claim 1 , wherein the suction holder comprises:
a suction pad that is formed by use of an elastic material, sucks and holds the one of the contact targets, has a substantially tube shape, and includes a through hole formed therein, the through hole communicating with the gap;
a holding portion that holds an outer periphery of the suction pad and is approachably and separably attached to the first probe holder; and
a coil spring that biases the holding portion in a direction in which the holding portion separates from the first probe holder.
4. The test unit according to claim 1 , wherein the first contact probe comprises:
a first contact member that is provided at the one longitudinal direction end portion side, has a plurality of claw portions having tapered distal end shapes, and comes into contact with the electrode of the contact target;
a second contact member that is provided at the other longitudinal direction end portion side, has a plurality of claw portions having tapered distal end shapes, and comes into contact with the electrode of the substrate; and
a coil spring that is provided between the first contact member and the second contact member, and expandably and contractably joins the first and second contact members together.