Capacitive pressure sensing using ionic film sensors
Thin-film pressure sensors are disclosed herein. Such sensors include one or more electrodes in contact with a sensing material. As the sensor deforms the capacitance of the sensor varies and is measurable either between two electrodes of the sensor, or between the one electrode of the sensor and an electrode formed by the surface to which the sensor is applied, such as skin. The sensing material can be an ionic material such as an ionic composite including an ionic liquid.
1. A sensor comprising:
a housing defining a cavity therein, the housing including a top layer disposed between the cavity and the external environment of the housing, the top layer including a first membrane having an electrically conductive surface facing the cavity; and
a solid layer of a patterned sensing material within the cavity, the sensing material being in contact with the electrically conductive surface of the first membrane.
2. A sensor consisting of:
a three-layer assembly of
a substrate layer;
a sensing material layer including an ionic material; and
a conductive material layer in contact with the sensing material layer.
3. The sensor of claim 2 wherein the conductive material layer is patterned to form two electrically isolated portions.
4. The sensor of claim 2 wherein the conductive material layer is disposed between the substrate layer and the sensing material layer.
5. A sensor consisting of:
a conductive material layer; and
a sensing material layer including an ionic material in contact with the conductive material layer.
6. The sensor of claim 5 wherein the sensing material layer comprises a plurality of coated conductive strands, wherein the coating on the strands comprises the ionic material.
7. The sensor of claim 6 wherein the plurality of strands comprises a fabric.
8. The sensor of claim 6 wherein the sensing material layer comprises a coated tape, wherein the coating on the tape comprises the ionic material.