Physical quantity sensor, physical quantity sensor device, electronic apparatus, and moving object
A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger.
1. A physical quantity sensor, comprising:
a substrate; and
an element piece arranged on the substrate,
wherein the element piece includes:
a first fixed portion fixed to the substrate,
a second fixed portion fixed to the substrate,
a first fixed electrode finger that is supported on the first fixed portion, the first fixed electrode finger being positioned on an opposite side of the first fixed portion from the second fixed portion,
a second fixed electrode finger that is supported on the second fixed portion, the second fixed electrode finger being positioned on an opposite side of the second fixed portion from the first fixed portion,
a third fixed portion that is positioned between the first fixed portion and the second fixed portion, and is fixed to the substrate,
a movable portion able to displace with respect to the third fixed portion,
an elastic portion that links the movable portion to the third fixed portion to be displaceable, and at least a portion of which is positioned between the first fixed electrode finger and the second fixed electrode finger,
a first movable electrode finger that is supported by the movable portion and is arranged facing the first fixed electrode finger, and
a second movable electrode finger that is supported by the movable portion and that is arranged facing the second fixed electrode finger.
2. The physical quantity sensor according to claim 1 ,
wherein the first fixed portion, the second fixed portion, and the third fixed portion are arranged along the vibration direction of the movable portion.
3. The physical quantity sensor according to claim 2 ,
wherein the movable portion is formed in a frame shape, and
the first fixed portion, the second fixed portion, and the third fixed portion are arranged on the inside of the movable portion.
4. The physical quantity sensor according to claim 3 ,
wherein the movable portion includes a first opposing portion arranged facing the first fixed electrode finger and a second opposing portion arranged facing the second fixed electrode finger.
5. The physical quantity sensor according to claim 4 ,
wherein the first opposing portion is wider than the first movable electrode finger, and
the second opposing portion is wider than the second movable electrode finger.
6. The physical quantity sensor according to claim 1 ,
wherein the movable portion includes a first part positioned between the elastic portion and the first fixed electrode finger, and a second part positioned between the elastic portion and the second fixed electrode finger.
7. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 1 ; and
an electronic component electrically connected to the physical quantity sensor.
8. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 2 ; and
an electronic component electrically connected to the physical quantity sensor.
9. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 3 ; and
an electronic component electrically connected to the physical quantity sensor.
10. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 4 ; and
an electronic component electrically connected to the physical quantity sensor.
11. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 5 ; and
an electronic component electrically connected to the physical quantity sensor.
12. A physical quantity sensor device, comprising:
the physical quantity sensor according to claim 6 ; and
an electronic component electrically connected to the physical quantity sensor.
13. An electronic apparatus, comprising:
the physical quantity sensor according to claim 1 .
14. An electronic apparatus, comprising:
the physical quantity sensor according to claim 2 .
15. An electronic apparatus, comprising:
the physical quantity sensor according to claim 3 .
16. An electronic apparatus, comprising:
the physical quantity sensor according to claim 4 .
17. A vehicle, comprising:
the physical quantity sensor according to claim 1 .
18. The physical quantity sensor according to claim 2 ,
wherein the movable portion includes a first part positioned between the elastic portion and the first fixed electrode finger, and a second part positioned between the elastic portion and the second fixed electrode finger.
19. The physical quantity sensor according to claim 3 ,
wherein the movable portion includes a first part positioned between the elastic portion and the first fixed electrode finger, and a second part positioned between the elastic portion and the second fixed electrode finger.
20. The physical quantity sensor according to claim 4 ,
wherein the movable portion includes a first part positioned between the elastic portion and the first fixed electrode finger, and a second part positioned between the elastic portion and the second fixed electrode finger.