Semiconductor chip, semiconductor package including the same, and method of manufacturing semiconductor chip

1. A semiconductor package comprising:

a package substrate; and

a plurality of semiconductor chips sequentially stacked on the package substrate, each of the plurality of semiconductor chips including a pad region and a cell region,

wherein each of the plurality of semiconductor chips includes,

a semiconductor device layer including a plurality of through silicon via (TSV) structures in the pad region,

a plurality of uppermost wirings on the semiconductor device layer, the plurality of uppermost wirings arranged at an equal distance in the cell region, the plurality of uppermost wirings having a same width and extending in parallel along one direction,

a plurality of pads on the semiconductor device layer, the plurality of pads connected to the plurality of TSV structures in the pad region,

a passivation layer including a bump hole, the bump hole exposing a portion of a top surface of each of the plurality of pads, the passivation layer covering at least a top surface of the plurality of uppermost wirings in the cell region,

a plurality of thermal bumps on the passivation layer in the cell region, the plurality of thermal bumps electrically insulated from the plurality of uppermost wirings, and

a plurality of signal bumps on the passivation layer in the pad region, the plurality of signal bumps electrically connected to the plurality of pads through the bump hole,

wherein the passivation layer has a top surface with a step height and a wave shape, and includes an inorganic insulating material.

2. The semiconductor package of claim 1 , wherein a bottom surface of each of the plurality of thermal bumps is in contact with the passivation layer and has a wave shape corresponding to the top surface of the passivation layer.

3. The semiconductor package of claim 1 , wherein the step height of the top surface of the passivation layer has a value which is less than a value of a thickness of each of the plurality of uppermost wirings.

4. The semiconductor package of claim 1 , wherein the plurality of semiconductor chips are electrically connected to the package substrate through the plurality of TSV structures.

5. The semiconductor package of claim 1 , wherein upper ends of the plurality of signal bumps and upper ends of the plurality of thermal bumps have a same level in each of the plurality of semiconductor chips.

6. The semiconductor package of claim 1 , wherein at least two adjacent uppermost wirings among the plurality of uppermost wirings are electrically connected to each other to function as one wiring, the one wiring is configured to transfer at least one of a power signal or a ground signal.

7. The semiconductor package of claim 6 , wherein at least a portion of each of the at least two adjacent uppermost wirings extends under at least one of the plurality of thermal bumps.

8. The semiconductor package of claim 1 , wherein a horizontal width of each of the plurality of thermal bumps has a value which is equal to or greater than a value of a horizontal width of each of the plurality of signal bumps.

9. The semiconductor package of claim 1 , wherein

the plurality of signal bumps are arranged at a first pitch, and

the plurality of thermal bumps are arranged at a second pitch greater than the first pitch.

10. A semiconductor chip comprising:

a semiconductor device layer including a first region and a second region

a plurality of lower wirings on the semiconductor device layer,

an inter-wiring insulation layer on the plurality of lower wirings,

a plurality of uppermost wirings on the inter-wiring insulation layer, the plurality of uppermost wirings arranged at an equal distance in the first region, the plurality of uppermost wirings having a same width and extending in parallel along one direction;

a passivation layer in the first region and the second region, the passivation layer covering at least a top surface of the plurality of uppermost wirings in the first region; and

a plurality of thermal bumps on the passivation layer, the plurality of thermal bumps electrically insulated from the plurality of uppermost wirings,

wherein the passivation layer has a top surface with a step height and a wave shape, and includes an inorganic insulating material.

11. The semiconductor chip of claim 10 , further comprising:

a plurality of pads on the semiconductor device layer in the second region; and

a plurality of signal bumps on the plurality of pads, the plurality of signal bumps electrically connected to the plurality of pads.

12. The semiconductor chip of claim 11 , wherein

the passivation layer further covers a top surface of the plurality of uppermost wirings in the second region, and includes a bump hole exposing a portion of a top surface of each of the plurality of pads,

the top surface of the passivation layer in the first region having a wave shape, and

each of the plurality of signal bumps is connected to a respective one of the plurality of pads through the bump hole.

13. The semiconductor chip of claim 11 , wherein an upper end of each of the plurality of signal bumps and an upper end of each of the plurality of thermal bumps have a same level.

14. The semiconductor chip of claim 10 , wherein at least two adjacent uppermost wirings of the plurality of uppermost wirings are electrically connected to each other to function as one wiring.

15. The semiconductor chip of claim 14 , wherein at least a portion of each of the at least two adjacent uppermost wirings extends under at least one of the plurality of thermal bumps.

16. The semiconductor chip of claim 14 , wherein the at least two adjacent uppermost wirings are configured to transfer at least one of a power signal or a ground signal.

17. The semiconductor chip of claim 10 , wherein a bottom surface of each of the plurality of thermal bumps has a wave shape corresponding to the top surface of the passivation layer.