FinFETs with various fin height
A device and method of forming a semiconductor circuit having FinFET devices that have fins of different height is provided. There is a shallow trench isolation layer (STI) on top of a semiconductor substrate. A first Fin Field Effect Transistor (FinFET) comprises a first semiconductor fin including a first layer that extends from a common substrate level through the STI layer to a first height above a top surface of the STI layer. There is a second FinFET comprising a second semiconductor fin including the first layer that extends from the common substrate level through the STI layer to the first height above the top surface of the STI layer, plus a second layer having a second height, plus a third layer having a third height. The second semiconductor fin is taller than the first semiconductor fin.
1. An integrated circuit, comprising:
a semiconductor substrate;
a shallow trench isolation layer (STI) on top of the semiconductor substrate;
a first Fin Field Effect Transistor (FinFET) comprising a first semiconductor fin including a first layer that extends from a common substrate level through the STI layer to a first height above a top surface of the STI layer; and
a second FinFET comprising a second semiconductor fin including the first layer that extends from the common substrate level through the STI layer to the first height above the top surface of the STI layer, plus a second layer having a second height, plus a third layer having a third height, wherein:
the second semiconductor fin is taller than the first semiconductor fin, and
the first layer is Si, the second layer is a uniform oxide, and the third layer is Si.
2. The integrated circuit of claim 1 , wherein the semiconductor substrate is silicon (Si).
3. The integrated circuit of claim 1 , wherein the semiconductor substrate is one of: (i) silicon dioxide, (ii) aluminum oxide, (iii) sapphire, (iv) germanium, (v) gallium arsenide (GaAs), (vi) an alloy of silicon and germanium, and (vii) indium phosphide (InP).
4. The integrated circuit of claim 1 , wherein the semiconductor substrate is over a silicon on insulator (SOI) layer.
5. The integrated circuit of claim 1 , further comprising a high-k dielectric surrounding each fin in a gate region of the integrated circuit.
6. The integrated circuit of claim 5 , further comprising an oxide layer between each fin and the high-k dielectric surrounding each fin in the gate region of the integrated circuit.
7. The integrated circuit of claim 1 , further comprising a metal stack surrounding each fin in a gate region of the integrated circuit to form a common gate for the first FinFET and the second FinFET.
8. The integrated circuit of claim 1 , wherein the first FinFET and the second FinFET are of a same static random access memory (SRAM) cell.
9. The integrated circuit of claim 1 , wherein the first FinFET is P-type and the second FinFET is N-type.
10. The integrated circuit of claim 1 , wherein:
a total height of the first semiconductor fin comprises a height of the first layer;
a total height of the second semiconductor fin comprises a sum of the height of the first layer, the height of the second layer, and a height of the third layer.