IP Library › Granted Patent US 10,141,245
Granted Patent B2
US 10,141,245 · App. 15/685,850 · Granted Nov 27, 2018

High-power acoustic device with improved performance

Inventors: Tarak A. Railkar (Plano, TX); Ian Y. Yee (Austin, TX); Jeffrey D. Galipeau (Apopka, FL); Jason Wu (Windermere, FL); Rodolfo E. Chang (Longwood, FL)
Assignee: Qorvo US, Inc.
H01L23/49513B81B7/0061H01L21/02186H01L21/4853H01L21/52H01L21/563H01L23/482H01L23/49506H01L23/53228H01L23/53242H01L24/00H03H9/00H03H9/08
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Quick Facts
Patent No.
US 10,141,245
App. No.
15/685,850
Granted
Nov 27, 2018
Kind
B2
Abstract

The present disclosure relates to a high-power acoustic device with improved performance. The disclosed acoustic device includes a substrate, a die-attach material, and an acoustic die. The substrate includes a substrate body and a die pad on a top surface of the substrate body. The die-attach material is a sintered material and applied over the die pad. The acoustic die is coupled to the die pad via the die-attach material. Herein, the acoustic die includes a die body and a metallization structure, which is sandwiched between the die body and the die-attach material.

Claims (39)

1. An apparatus comprising:

a substrate comprising a substrate body and a die pad on a top surface of the substrate body;

a die-attach material applied over the die pad, wherein the die-attach material is a sintered material;

an acoustic die coupled to the die pad via the die-attach material, wherein:

the acoustic die includes a plurality of acoustic components, a die body and a metallization structure;

the plurality of acoustic components resides over a top surface of the die body and the metallization structure resides over a bottom surface of the die body; and

the metallization structure is vertically sandwiched between the die body and the die-attach material.

2. The apparatus of claim 1 wherein the metallization structure provides adhesion to the die body, chemical bonding to the die-attach material, and a wetting function that provides an interface between the die body and die-attach material.

3. The apparatus of claim 2 wherein the metallization structure comprises:

a first layer that is in contact with the die body and provides the adhesion to the die body;

a second layer that is in contact with the die-attach material and provides the chemical bonding to the die-attach material; and

a third layer that is sandwiched between the first layer and the second layer and provides the wetting function.

4. The apparatus of claim 3 wherein:

the first layer is formed of Titanium (Ti), Titanium Tungsten (TiW), or Chromium (Cr);

the second layer is formed of gold (Au) or silver (Ag); and

the third layer is formed of TiW, Au, Nickel-Vanadium (NiV), or Nickel (Ni).

5. The apparatus of claim 2 wherein the metallization structure comprises:

a first layer that is in contact with the die body and provides the adhesion to the die body and the wetting function; and

a second layer that is sandwiched between the first layer and the die-attach material and provides the chemical bonding to the die-attach material.

6. The apparatus of claim 2 wherein the metallization structure comprises:

a first layer that is in contact with the die body and provides the adhesion to the die body; and

a second layer sandwiched between the first layer and the die-attach material, wherein the second layer provides the chemical bonding to the die-attach material and the wetting function.

7. The apparatus of claim 2 wherein the metallization structure comprises:

a first layer that is in contact with the die body and provides the adhesion to the die body and the wetting function; and

a second layer sandwiched between the first layer and the die-attach material, wherein the second layer provides the chemical bonding to the die-attach material and the wetting function.

8. The apparatus of claim 2 wherein the metallization structure is formed of at least one of a group consisting of TiW, Ti, Cr, Ni, NiV, Ag, and Au.

9. The apparatus of claim 1 wherein the acoustic die further includes an enclosure coupled to the top surface of the die body to encapsulate the plurality of acoustic components, wherein the enclosure includes a cap and an outer wall extending from the cap to the top surface of the die body.

10. The apparatus of claim 9 wherein:

the substrate further comprises a plurality of wire-contacts on the top surface of the substrate body and surrounding the die pad; and

the acoustic die further comprises a plurality of wires, wherein each of the plurality of wires is outside the enclosure and extends from the top surface of the die body to a corresponding wire-contact on the top surface of the substrate body.

11. The apparatus of claim 1 wherein the substrate body is formed of one of a group consisting of FR-4, BT-NS, PTFE, Rogers RO4003, RO6035, and LCP.

12. The apparatus of claim 1 wherein the substrate body is formed of one of a group consisting of alumina, low temperature co-fired ceramic (LTCC), or high temperature co-fired ceramic (HTCC).

13. The apparatus of claim 1 wherein the substrate is a printed circuit board (PCB).

14. The apparatus of claim 1 wherein the die-attach material is one of a group consisting of sintered silver, sintered copper, and sintered gold.

15. The apparatus of claim 1 wherein the acoustic die is a bulk acoustic wave (BAW) die.

16. The apparatus of claim 1 wherein the acoustic die is a surface acoustic wave (SAW) die.

17. The apparatus of claim 1 wherein the substrate further comprises a heat spreader embedded in the substrate body, wherein the heat spreader is thermally coupled to the die pad and extends from the top surface of the substrate body to a bottom surface of the substrate body.

18. The apparatus of claim 1 wherein the substrate further includes a plurality of thermal vias, wherein each of the plurality of thermal vias is thermally coupled to the die pad and extends from the top surface of the substrate body to a bottom surface of the substrate body.

19. The apparatus of claim 1 further comprising a molding compound formed over the substrate to encapsulate the acoustic die.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 8, 2017
From: RAILKAR, TARAK A.; YEE, IAN Y.; GALIPEAU, JEFFREY D.; WU, JASON; CHANG, RODOLFO E.
To: QORVO US, INC.
Reel/Frame 043529/0819 →
Continuity (2)
Provisional Application 62378803 · Aug 24, 2016
Related Publication 20180061744A1 · Mar 1, 2018