Fin formation in fin field effect transistors
A method of forming a semiconductor device that includes forming a silicon including fin structure and forming a germanium including layer on the silicon including fin structure. Germanium is then diffused from the germanium including layer into the silicon including fin structure to convert the silicon including fin structure to silicon germanium including fin structure.
1. A method of forming a semiconductor device, the method comprising:
forming a plurality of fins from a first material, the plurality of fins formed over a substrate and defining troughs therebetween;
depositing a semiconductor layer formed from a second material over the plurality of fins, the second material being different than the first material;
depositing dielectric material covering the plurality of fins and the semiconductor layer, the dielectric material defining dielectric regions;
diffusing the second material from the semiconductor layer into an entirety of each fin of the plurality of fins;
removing the dielectric regions; and
planarizing an upper surface of the dielectric regions to be planar with an upper surface of the plurality of fins.
2. The method of claim 1 , wherein the first material is silicon (Si) and the second material is germanium (Ge).
3. The method of claim 1 , wherein the second material is mixed with the first material by thermal annealing.
4. The method of claim 1 , wherein the second material is mixed with the first material to form a third material between the dielectric regions.
5. The method of claim 4 , wherein the third material is silicon germanium (SiGe).
6. The method of claim 1 , wherein the dielectric regions are formed from an oxide.
7. The method of claim 1 , wherein the dielectric regions are formed from a nitride.
8. The method of claim 1 , wherein the semiconductor layer is formed on side walls and the upper surface of the plurality of fins.
9. The method of claim 8 , wherein the semiconductor layer is epitaxially grown on the sidewalls and the upper surface of the plurality of fins.
10. The method of claim 1 , wherein the plurality of fins are formed by rotating the substrate so that a notch in the substrate is rotated 45° from a <110> direction to a <100> direction.
11. A method of forming a semiconductor device, the method comprising:
forming a plurality of fins including silicon (Si), the plurality of tins formed over, a substrate and defining troughs therebetween;
depositing a semiconductor layer including germanium (Ge) over the plurality of fins;
depositing dielectric material covering the plurality of fins and the semiconductor layer, the dielectric material defining dielectric regions;
diffusing the germanium from the semiconductor layer into an entirety of the silicon of each fin of the plurality of fins to form silicon germanium (SiGe) fins;
removing the dielectric regions; and
planarizing an upper surface of the dielectric regions to be planar with an upper surface of the plurality of fins.
12. The method of claim 11 , wherein the dielectric regions are formed from an oxide.
13. The method of claim 11 , wherein the dielectric regions are formed from a nitride.
14. The method of claim 11 , wherein the semiconductor layer is formed sidewalls and the upper surface of the plurality of fins.
15. The method of claim 14 , wherein the semiconductor layer is epitaxially grown on sidewalls and the upper surface of the plurality of fins.
16. The method of claim 11 , wherein the plurality of fins are formed by rotating the substrate so that a notch in the substrate is rotated 45° from a <110> direction to a <100> direction.
17. The method of claim 11 , wherein the germanium is diffused into the silicon by thermal annealing.
18. The method of claim 11 , wherein the SiGe fins are formed in a channel region of the semiconductor device.
19. The method of claim 11 , wherein a gate structure is formed to contact the SiGe fins.
20. The method of claim 11 , wherein the SiGe fins have germanium content ranging from 10 at. % to 90 at. %.