Integrated multi-sensing systems
This invention describes the structure and function of an integrated multi-sensing systems in stacked configuration. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The method uses Fabry-Perot Interferometer in conjunction with light source and a photodetector integrated in stacked configuration. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.
1. A system, comprising:
a light source; and
an interferometer; and
a photodetector;
wherein said interferometer comprising of semi-transparent mirrors;
wherein said light source, said interferometer and said photodetector are coupled in a three dimensional stack configuration;
wherein said light source and said interferometer and said photodetector are separated from each other using spacers;
wherein said interferometer is coupled between said light source and said photodetector;
wherein said light source transmits light to said interferometer;
wherein said transmitted light passes through said interferometer and is detected by said photodetector;
wherein said system dynamically measures the displacement between said semi-transparent mirrors.
2. A system as in claim 1 , wherein any of said semi-transparent mirrors are movable.
3. A system as in claim 1 , wherein said system comprises further of a plurality of electrostatic actuators, where said displacement between said semi-transparent mirrors is adjusted by said electrostatic actuators.
4. A system as in claim 2 , wherein the surface of said semi-transparent mirrors can function as electrostatic actuator.
5. A system as in claim 2 , wherein said displacement between said semi-transparent mirrors is configured by applying electric voltage to said electrostatic actuators; enabling said system to detect different gases.
6. A system as in claim 1 , wherein said semi-transparent mirrors are vibrated via acoustic pressure level; enabling said system to function as a microphone.
7. A system as in claim 1 , wherein said displacement between said semi-transparent mirrors is changed by air pressure; enabling said system to function as a pressure sensor.
8. A system as in claim 1 , wherein said semi-transparent mirrors are vibrated via movement of said system; enabling said system to function as accelerometer.
9. A system as in claim 1 , wherein a single instance of said system can function as any combination of pressure sensor, microphone, accelerometer, and gas sensor.
10. A system as in claim 1 , wherein said light source, said interferometer, and said photodetector can be of any shape, size and material.
11. A system as in claim 1 , wherein said light source, said photodetector and said interferometer are stacked by some offset to allow clearance for direct attachment to pads or conductive elements.
12. A system as in claim 11 , wherein said light source, said photodetector, and said electrostatic actuators are electrically coupled using wire bond or vias; with or without redistribution layer.
13. A system as in claim 1 , wherein one or more devices are surface mounted or embedded within said substrate.
14. A system as in claim 1 , wherein an energy source is coupled on any part of said substrate.
15. A system as in claim 1 , wherein said system comprises of three or more of said semi-transparent mirrors.
16. A system as in claim 1 , wherein trenches of any size and shape are etched in any of said semi-transparent mirrors.
17. A system as in claim 1 , wherein said light source can be monochrome light, broadband light, or laser.
18. A system as in claim 1 , wherein said light source and said interferometer and said photodetector are separated from each other using two spacers.
19. A system as in claim 1 , wherein said interferometer comprising of two semi-transparent mirrors and wherein said two semi-transparent mirrors are parallel to one another.
20. A system as in claim 1 , wherein the surface of said semi-transparent mirrors can function as electrostatic actuator.
21. A system as in claim 1 , wherein said displacement between said semi-transparent mirrors is configured by applying electric voltage to said electrostatic actuators; enabling said system to detect different gases.