Apparatus for inspecting robot hands

1. An inspection apparatus, comprising:

a supporting substrate;

a first sensor unit provided on the supporting substrate, the first sensor unit comprising a first light-emitting device and a first light-receiving device which are spaced apart from each other and face each other; and

a second sensor unit provided on the supporting substrate, the second sensor unit comprising a second light-emitting device and a second light-receiving device which are spaced apart from each other and face each other,

wherein the first and second light-emitting devices and the first and second light-receiving devices are disposed at a same distance from a top surface of the supporting substrate, and

the first and second sensor units are configured to detect whether a plurality of robot hands moves in a first direction perpendicular to the top surface of the supporting substrate and to collect data corresponding to a detection of the plurality of robot hands, wherein the data corresponding to the detection of the robot hands is transmitted to a management unit, wherein the management unit is configured to obtain information on distances between each of the robot hands by using the data corresponding to the detection of the robot hands.

2. The inspection apparatus of claim 1 , wherein the robot hand inspection apparatus is configured to allow a robot hand to pass through regions between the first light-emitting device and the first light-receiving device and between the second light-emitting device and the second light-receiving device.

3. The inspection apparatus of claim 1 , further comprising supporting rods disposed on the supporting substrate,

wherein the first and second light-emitting devices and the first and second light-receiving devices are spaced apart from the supporting substrate and are respectively supported by the supporting rods.

4. The inspection apparatus of claim 1 , wherein the first light-emitting device is disposed at a first height with respect to the supporting substrate in the first direction, and

the first height is greater than a thickness of a robot hand.

5. The inspection apparatus of claim 1 , wherein the first and second sensor units are configured to detect two different points of a robot hand.

6. The inspection apparatus of claim 1 , wherein the first sensor unit is configured to detect whether a robot hand passes through a first imaginary line connecting the first light-emitting device and the first light-receiving device, and

the second sensor unit is configured to detect whether the robot hand passes through a second imaginary line connecting the second light-emitting device and the second light-receiving device.

7. The inspection apparatus of claim 1 , wherein the first and second sensor units, respectively, are configured to measure start and end times of detecting each of the robot hands, wherein the data corresponding to the detection of the plurality of robot hands includes data measured by the first and second sensor units.

8. The inspection apparatus of claim 7 , wherein the first and second sensor units, respectively, are configured to detect each of the robot hands at substantially the same time and to stop detecting each of the robot hands at substantially the same time when the robot hands are substantially parallel to the supporting substrate.

9. The inspection apparatus of claim 7 , further comprising a wireless transmitting part for transmitting data measured by the first and second sensor units to the management unit,

wherein the management unit is further configured to obtain information on inclination angles of each of the robot hands using the data measured by the first and second sensor units and to display the information on the distances between each of the robot hands and the inclination angles of the robot hands.

10. A system for inspecting a wafer transferring robot, comprising:

an inspection apparatus including:

a supporting substrate;

a first light-emitting device disposed at a first distance from the supporting substrate in a first direction and configured to emit a first light in a second direction, wherein the first and second directions cross each other;

a second light-emitting device disposed at the first distance from the supporting substrate in the first direction and configured to emit a second light in the second direction, wherein the second light-emitting device is spaced apart from the first light-emitting device in a third direction that is orthogonal the first and second directions;

a first light-receiving device configured to detect the first light;

a second light-receiving device configured to detect the second light; and

a transmitting unit;

a wafer transferring unit including:

a first robot hand and a second robot hand spaced apart from the first robot hand in the first direction, wherein the first and second robot hands are disposed on the substrate; and

a first control part configured to move the first and second robot hands in the first direction at a first speed, wherein the first and second robot hands are detected by the first and second light-receiving devices, respectively, when blocking the first and second lights from being detected by the first and second light-receiving devices,

wherein the transmitting unit is configured to transmit times when the first and second robot hands were detected by the first and second light-receiving devices to a receiving part of a management unit; and

the management unit including:

the receiving part configured to receive the transmitted times when the first and second robot hands were detected by the first and second light-receiving devices; and

a second control part configured to determine a first angle of the first robot hand with respect to the substrate using the first speed and the received times when the first and second robot hands were detected by the first and second light-receiving devices.

11. The system of claim 10 , wherein the second control part is further configured to determine a first distance between the first and second robot hands in the first direction using the first speed and the received times when the first and second robot hands were detected by the first and second light-receiving devices.

12. The system of claim 11 , wherein the received times when the first and second robot hands were detected by the first and second light-receiving devices include a first time when the first robot hand was detected by the first light-receiving device and a second time when the second robot hand was detected by the second light-receiving device.

13. The system of claim 10 , wherein the first angle of the first robot hand is determined using a first time in which the first light-receiving device detects a first portion of the first robot hand, a second time in which the second light-receiving device detects a second portion of the first robot hand, and the first speed.

14. The system of claim 11 , wherein the management unit further includes a storage device configured to store the first angle and the first distance, and a display device configured to display the first angle and the first distance.