Integrated circuit with conductive line having line-ends
A semiconductor device is disclosed, including a plurality of conductive features disposed over a substrate. A dielectric layer separates the conductive features. A conductive line is provided, connecting a subset of the conductive features. The conductive line includes a line-like portion and a line-end portion.
1. A semiconductor device comprising:
a plurality of conductive features over a substrate;
a dielectric layer separating the conductive features; and
a conductive line connecting a subset of the conductive features, the conductive line including:
a line-like portion having a first length and a first width; and
a line-end portion connecting to an end of the line-like portion and disposed over one or more conductive features of the subset of the conductive features, wherein the line-end portion has a second width, larger than the first width, wherein the line-end portion has a second length, smaller than the first length.
2. The device of claim 1 , wherein the line-end portion of the conductive line is centered with respect to the end of the line-like portion.
3. The device of claim 1 , wherein the line-end portion of the conductive line, having a larger width than the first width of the line-like portion, is not centered with respect to the end of the line-like portion.
4. The device of claim 1 , wherein the line-end portion has a rectangular shape.
5. The device of claim 1 , wherein the plurality of conductive features extends through the dielectric layer.
6. The device of claim 1 , further comprising a hard mask (HM) layer disposed over the dielectric layer, wherein the conductive line is formed within the dielectric layer and the HM layer.
7. A semiconductor device comprising:
a substrate;
a first set of conductive features formed over the substrate;
a second set of conductive features formed over the substrate;
a first dielectric layer separating the first set of conductive features and the second set of conductive features;
a second dielectric layer formed over the first dielectric layer; and
a hard mask (HM) layer formed over the second dielectric layer, wherein the HM layer and the second dielectric layer comprise a line-end opening and a line-like opening, wherein the line-end opening is aligned to the first set of conductive features, wherein the line-end opening exposes the first set of conductive features, wherein the line-end opening connects with the line-like opening at a first end of the line-like opening, wherein the line-like opening has a first width and the line-end opening has a second width greater than the first width, wherein the line-like opening has a first length and the line-end opening has a second length smaller than the first length.
8. The device of claim 7 , further comprising a conductive line connecting the first set of conductive features and the second set of conductive features.
9. The device of claim 8 , wherein the conductive line is disposed in a trench within the second dielectric layer.
10. The device of claim 7 , wherein the line-like opening is aligned to the second set of conductive features.
11. The device of claim 7 , wherein the line-end opening has a rectangular shape.
12. The device of claim 7 , comprising a second line-end opening connected with the line-like opening at a second end of the line-like opening.
13. The device of claim 7 , wherein the HM layer includes a stack of layers, comprising:
a bottom titanium nitride layer;
an anti-reflection coating (ARC) layer formed over the bottom titanium nitride layer; and
a top titanium nitride layer formed over the ARC layer.
14. A semiconductor device comprising:
a substrate;
a first dielectric layer formed over the substrate;
a second dielectric layer formed over the first dielectric layer;
a set of conductive features extending through the first and second dielectric layers;
a third dielectric layer formed over the second dielectric layer; and
a hard mask (HM) layer formed over the third dielectric layer, wherein a trench is formed within the third dielectric layer and the HM layer, the trench comprising a line-like opening and two line-end openings connecting with the line-like opening at respective ends of the line-like opening, wherein the two line-end openings are aligned to a first subset of the set of conductive features, wherein the two line-end openings expose the first subset of the set of conductive features, wherein the line-like opening has a first width and the two line-end openings each have a second width greater than the first width, wherein the line-like opening has a first length and the two line-end openings each have a second length smaller than the first length.
15. The device of claim 14 , wherein the trench is filled with conductive material to form a conductive line.
16. The device of claim 15 , wherein the conductive line connects at least two conductive features within the set of conductive features.
17. The device of claim 14 , wherein the line-like opening is aligned to a second subset of the set of conductive features.
18. The device of claim 14 , wherein a length and a width of each line-end opening is the same.
19. The device of claim 14 , wherein the respective ends of the line-like opening abut respective sides of each of the line-end openings.
20. The device of claim 14 , wherein the HM layer includes a stack of layers, comprising:
a bottom titanium nitride layer;
an anti-reflection coating (ARC) layer formed over the bottom titanium nitride layer; and
a top titanium nitride layer formed over the ARC layer.