IP Library › Granted Patent US 10,163,839
Granted Patent B2
US 10,163,839 · App. 15/675,264 · Granted Dec 25, 2018

Bump on pad (BOP) bonding structure in semiconductor packaged device

Inventors: Yao-Chun Chuang (Hsinchu, TW); Chita Chuang (Hsinchu, TW); Chen-Cheng Kuo (Chu-Pei, TW); Chen-Shien Chen (Zhubei, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L24/13H01L23/488H01L23/49838H01L24/05H01L24/16H01L24/81H01L25/105H01L2224/0401H01L2224/05015H01L2224/05022H01L2224/05124H01L2224/05144H01L2224/05147H01L2224/05552H01L2224/05572H01L2224/131H01L2224/1308H01L2224/13014H01L2224/13082H01L2224/13147H01L2224/141H01L2224/16104H01L2224/16227H01L2224/16237H01L2224/814H01L2224/81191H01L2224/81385H01L2224/81815H01L2225/1058H01L2924/00014H01L2924/014H01L2924/1305H01L2924/13091H01L2924/35121
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Quick Facts
Patent No.
US 10,163,839
App. No.
15/675,264
Granted
Dec 25, 2018
Kind
B2
Abstract

The embodiments described above provide enlarged overlapping surface areas of bonding structures between a package and a bonding substrate. By using elongated bonding structures on either the package and/or the bonding substrate and by orienting such bonding structures, the bonding structures are designed to withstand bonding stress caused by thermal cycling to reduce cold joints.

Claims (43)

1. A package structure comprising:

an integrated circuit package comprising a conductive post, the conductive post having a first plan-view shape;

a substrate bonded to the integrated circuit package, the substrate comprising:

a first dielectric layer;

a first contact pad over the first dielectric layer, a bottom surface of the first contact pad being in physical contact with a topmost surface of the first dielectric layer, the first contact pad having a second plan-view shape, a line extending through a first center of the first plan-view shape and a second center of the second plan-view shape intersecting the first contact pad at an angle having less than 90 degrees, the first plan-view shape being a first racetrack shape and the second plan-view shape being a second racetrack shape; and

a second dielectric layer over the first contact pad and the first dielectric layer, the second dielectric layer being in physical contact with the topmost surface of the first dielectric layer; and

a solder layer extending through the second dielectric layer, the solder layer electrically and mechanically coupling the conductive post to the first contact pad.

2. The package structure of claim 1 , wherein a long axis of the first racetrack shape is oriented toward a center of the integrated circuit package.

3. The package structure of claim 1 , wherein the integrated circuit package further comprises:

a second contact pad; and

an under bump metallurgy (UBM) interposed between the second contact pad and the conductive post.

4. The package structure of claim 1 , wherein a coefficient of thermal expansion (CTE) of the integrated circuit package is between about 2 ppm/° C. and about 3 ppm/° C., and wherein a coefficient of thermal expansion (CTE) of the substrate is about 17 ppm/° C.

5. The package structure of claim 1 , wherein an area of the first plan-view shape is less than an area of the second plan-view shape.

6. The package structure of claim 1 , wherein a width of the second racetrack shape is between about 10 μm and about 10 μm.

7. The package structure of claim 1 , wherein the substrate further comprises a routing line, the routing line being in electrical contact with the first contact pad.

8. A package structure comprising:

a die package comprising a conductive post, the conductive post having a first plan-view shape;

a substrate bonded to the die package, the substrate comprising:

a dielectric layer;

a contact pad over the dielectric layer, a bottom surface of the contact pad being in physical contact with a topmost surface of the dielectric layer, the contact pad having a second plan-view shape, a first center of the first plan-view shape being laterally spaced apart from a second center of the second plan-view shape, the first plan-view shape being a first racetrack shape and the second plan-view shape being a second racetrack shape; and

a solder resist layer over the contact pad and the dielectric layer, the solder resist layer being in physical contact with the topmost surface of the dielectric layer; and

a solder layer extending through the solder resist layer, the solder layer being in physical contact with the conductive post and the contact pad.

9. The package structure of claim 8 , wherein the solder layer is in physical contact with a topmost surface of the solder resist layer.

10. The package structure of claim 8 , wherein a coefficient of thermal expansion (CTE) of the substrate is greater than a CTE of the die package.

11. The package structure of claim 8 , wherein the solder layer comprises:

a first portion in physical contact with the conductive post, the first portion having a first width; and

a second portion in physical contact with the contact pad, the second portion having a second width, the second width being different from the first width.

12. The package structure of claim 11 , wherein the second width is less than the first width.

13. The package structure of claim 8 , wherein a first surface area of the first racetrack shape is different from a second surface area of the second racetrack shape.

14. The package structure of claim 8 , wherein a long axis of the first racetrack shape is oriented toward a center of the die package.

15. A package structure comprising:

a die package comprising a first conductive post and a second conductive post, the first conductive post being disposed at a first distance from a center of the die package, the second conductive post being disposed at a second distance from the center of the die package, the second distance being different from the first distance;

a substrate bonded to the die package, the substrate comprising:

a dielectric layer;

a first contact pad and a second contact pad over the dielectric layer, a bottom surface of the first contact pad being in physical contact with a topmost surface of the dielectric layer; and

a passivation layer over the first contact pad and the second contact pad, the passivation layer being in physical contact with the topmost surface of the dielectric layer;

a first solder layer extending through the passivation layer, the first solder layer electrically and mechanically coupling the first conductive post to the first contact pad, the first conductive post having a first plan-view shape, the first contact pad having a second plan-view shape, a center of the first plan-view shape being laterally spaced apart from a center of the second plan-view shape by a third distance, the first plan-view shape being a first racetrack shape and the second plan-view shape being a second racetrack shape; and

a second solder layer extending through the passivation layer, the second solder layer electrically and mechanically coupling the second conductive post to the second contact pad, the second conductive post having a third plan-view shape, the second contact pad having a fourth plan-view shape, a center of the third plan-view shape being laterally spaced apart from a center of the fourth plan-view shape by a fourth distance, the fourth distance being different from the third distance, the third plan-view shape being a third racetrack shape and the fourth plan-view shape being a fourth racetrack shape.

16. The package structure of claim 15 , wherein the second distance is greater than the first distance.

17. The package structure of claim 16 , wherein the fourth distance is greater than the third distance.

18. The package structure of claim 15 , wherein a pitch between the first conductive post and the second conductive post is between about 30 μm and about 200 μm.

19. The package structure of claim 15 , wherein a coefficient of thermal expansion (CTE) of the substrate is greater than a CTE of the die package.

20. The package structure of claim 15 , wherein a first long axis of the first racetrack shape and a second long axis of the third racetrack shape are oriented toward the center of the die package.

Continuity (4)
Continuation 14934634 · Nov 6, 2015
Continuation 13733692 · Jan 3, 2013
Provisional Application 61677873 · Jul 31, 2012
Related Publication 20170345783A1 · Nov 30, 2017