Semiconductor device and a method for forming a semiconductor
A method for forming a semiconductor device includes forming at least one graphene layer on a surface of a semiconductor substrate. The method further includes forming a silicon carbide layer on the at least one graphene layer.
1. A method for forming a semiconductor device, the method comprising:
forming at least one graphene layer on a surface of a semiconductor substrate, and
forming a silicon carbide layer on the at least one graphene layer,
wherein forming the silicon carbide layer comprises:
growing a first portion of the silicon carbide layer by atomic layer deposition, molecular beam epitaxy, or by chemical vapor deposition with a precursor at a first concentration; and
continuing the growth of the silicon carbide layer by atomic layer deposition, molecular beam epitaxy, or by chemical vapor deposition with the precursor at a second concentration higher than the first concentration.
2. The method of claim 1 , further comprising:
forming a plurality of openings in the at least one graphene layer before forming the silicon carbide layer.
3. The method of claim 2 , wherein a maximal lateral dimension of each opening of the plurality of openings lies between 10 nm and 10 μm.
4. The method of claim 1 , wherein forming the silicon carbide layer comprises:
heating the semiconductor substrate in an inert atmosphere until a predefined temperature is reached.
5. The method of claim 1 , wherein the semiconductor substrate comprises at least one silicon carbide substrate layer, wherein the at least one graphene layer is formed on the at least one silicon carbide substrate layer of the semiconductor substrate.
6. The method of claim 5 , wherein forming the at least one graphene layer comprises:
forming a single graphene layer on a silicon face of the at least one silicon carbide substrate layer and/or
forming at least one graphene layer on a carbon face of the at least one silicon carbide substrate layer.
7. The method of claim 5 , wherein forming the at least one graphene layer on the at least one silicon carbide substrate layer of the semiconductor substrate comprises:
heating the semiconductor substrate to a temperature of at least 900° C. in a vacuum or in an inert atmosphere.
8. A semiconductor device, comprising:
at least one graphene layer arranged between a semiconductor substrate and a silicon carbide layer,
wherein the silicon carbide layer comprises at least one doping region of a semiconductor device structure, wherein the at least one doping region is located adjacently to the at least one graphene layer.
9. The semiconductor device of claim 8 , wherein a doping concentration of the semiconductor substrate between the at least one graphene layer and a back side surface of the semiconductor substrate lies between 1×10 18 doping atoms per cm 3 and 1×10 20 doping atoms per cm 3 .
10. The semiconductor device of claim 8 , wherein the at least one doping region of the semiconductor device structure is a source/drain region of a metal oxide semiconductor field effect transistor structure, a collector/emitter region of an insulated gate bipolar junction transistor structure, an anode region or cathode region of a thyristor structure, or an anode region or cathode region of a diode structure.
11. The semiconductor device of claim 8 , wherein the semiconductor substrate comprises a plurality of electrically conductive structures extending from an electrically conductive contact layer located at a back side surface of the semiconductor substrate towards a surface of the semiconductor substrate at which the at least one graphene layer is formed.
12. A method for forming a semiconductor device, the method comprising:
forming at least one graphene layer on a surface of a semiconductor substrate,
forming a silicon carbide layer on the at least one graphene layer, and
forming a semiconductor device structure comprising at least one doping region in the silicon carbide layer, the at least one doping region located adjacently to the at least one graphene layer.
13. A method for forming a semiconductor device, the method comprising:
forming at least one graphene layer on a surface of a semiconductor substrate, and
forming a silicon carbide layer on the at least one graphene layer,
wherein forming the at least one graphene layer comprises forming a multi-layer graphene structure comprising less than 10 atomic layers of graphene on the surface of the semiconductor substrate.
14. A method for forming a semiconductor device, the method comprising:
forming at least one graphene layer on a surface of a semiconductor substrate,
forming a silicon carbide layer on the at least one graphene layer, and
removing the semiconductor substrate from the silicon carbide layer.
15. The method of claim 14 , further comprising:
forming a stress-inducing layer on the silicon carbide layer or providing a stress-inducing heating or cooling process for inducing stress between the silicon carbide layer and the semiconductor substrate for removing the semiconductor substrate from the silicon carbide layer.
16. The method of claim 14 , further comprising:
arranging the silicon carbide layer on a carrier substrate.
17. The method of claim 14 , further comprising:
removing at least one graphene layer remaining on the silicon carbide layer.