FinFET with doped isolation insulating layer

1. A method for manufacturing a semiconductor device, comprising:

forming one or more fins over a substrate;

forming a mask layer over the one or more fins;

forming an isolation insulating layer over the one or more fins so that top surfaces of the one or more fins and mask layer are buried inside the isolation insulating layer, and the isolation insulating layer contacts side surfaces of the one or more fins and mask layer;

introducing an oxygen reactive dopant into the isolation insulating layer;

annealing the isolation insulating layer containing the dopant and oxidizing the dopant; and

removing a portion of the doped isolation insulating layer so as to expose a portion of the one or more fins.

2. The method for manufacturing a semiconductor device of claim 1 , wherein the dopant is selected from the group consisting of antimony, arsenic, germanium, indium, silicon, and combinations thereof.

3. The method for manufacturing a semiconductor device of claim 1 , wherein the dopant is introduced into the isolation insulating layer by ion implantation.

4. The method for manufacturing a semiconductor device of claim 3 , wherein the dopant is implanted at an energy of about 1 KeV to 80 KeV and a dose of about 1×10 13 to 1×10 17 atoms/cm 2 .

5. The method for manufacturing a semiconductor device of claim 1 , wherein the device comprises a plurality of fins, and the isolation insulating layer is formed so that it fills trenches between adjacent fins.

6. The method for manufacturing a semiconductor device of claim 1 , further comprising planarizing the isolation insulating layer after annealing the isolation insulating layer.

7. The method for manufacturing a semiconductor device of claim 6 , further comprising performing a second anneal after planarizing the isolation insulating layer and before removing a portion of the isolation insulating layer.

8. The method for manufacturing a semiconductor device of claim 1 , further comprising forming a gate structure on first exposed regions of the fins,

wherein the gate structure comprises a gate dielectric layer formed on the fins and a gate electrode layer formed on the gate dielectric layer.

9. The method for manufacturing a semiconductor device of claim 8 , further comprising forming source/drain regions on second regions of the fins.

10. The method for manufacturing a semiconductor device of claim 1 , wherein the introducing a dopant into the isolation insulating layer imparts a compressive stress into the isolation insulating layer.

11. A method for manufacturing a semiconductor device, comprising:

forming a plurality of fins over a substrate;

forming a mask layer over the plurality of fins;

forming an isolation insulating layer over the fins so that top surfaces of the plurality of fins and mask layer are buried inside the isolation insulating layer, and the isolation insulating layer contacts side surfaces of the one or more fins and mask layer, wherein the isolation insulating layer fills trenches between adjacent fins;

introducing an oxygen reactive dopant into the isolation insulating layer;

performing a first anneal of the isolation insulating layer containing the dopant and oxidizing the dopant;

planarizing the isolation insulating layer;

performing a second anneal of the isolation insulating layer; and

removing a portion of the doped isolation insulating layer so as to expose a portion of the fins.

12. The method for manufacturing a semiconductor device of claim 11 , wherein the dopant is selected from the group consisting of antimony, arsenic, germanium, indium, silicon, and combinations thereof.

13. The method for manufacturing a semiconductor device of claim 11 , wherein the isolation insulating layer comprises an oxide.

14. The method for manufacturing a semiconductor device of claim 11 , wherein the introducing a dopant into the isolation insulating layer imparts a compressive stress into the isolation insulating layer.

15. The method for manufacturing a semiconductor device of claim 11 , further comprising:

forming a gate structure on first exposed regions of the fins; and

forming source/drain regions on second regions of the fins.

16. A method for manufacturing a semiconductor device, comprising:

forming a mask layer and an isolation insulating layer over a plurality of fins on a semiconductor substrate so that top surfaces of the plurality of fins and mask layer are buried inside the isolation insulating layer, and the isolation insulating layer contacts side surfaces of the plurality of fins and mask layer;

introducing an oxygen reactive dopant into the isolation insulating layer;

oxidizing the oxygen reactive dopant in the isolation insulating layer,

wherein the dopant is introduced into the isolation insulating layer by ion implantation at an energy of about 1 KeV to 80 KeV and a dose of about 1×10 13 to 1×10 17 atoms/cm 2 ; and

removing a portion of the doped isolation insulating layer so as to expose a portion of the plurality of fins.

17. The method for manufacturing a semiconductor device of claim 16 , wherein the oxygen reactive dopant is selected from the group consisting of antimony, arsenic, germanium, indium, silicon, and combinations thereof.

18. The method for manufacturing a semiconductor device of claim 16 , further comprising:

forming a gate structure on first exposed regions of the fins; and

forming source/drain regions on second regions of the fins.

19. The method for manufacturing a semiconductor device of claim 16 , further comprising:

performing a first anneal of the isolation insulating layer containing the dopant; and

planarizing the isolation insulating layer after the first anneal.

20. The method for manufacturing a semiconductor device of claim 19 , further comprising performing a second anneal of the isolation insulating layer after planarizing the isolation insulating layer.