Trace/via hybrid structure and method of manufacture
A method of forming an interconnect that includes providing a sacrificial trace structure using an additive forming method. The sacrificial trace structure having a geometry for the interconnect. The method continuous with forming a continuous seed metal layer on the sacrificial trace structure; and removing the sacrificial trace structure, wherein the continuous seed metal layer remains. An interconnect metal layer may be formed on the continuous seed layer. A dielectric material may then be formed on the interconnect metal layer to encapsulate a majority of the interconnect metal layer, wherein ends of the interconnect metal layer are exposed through one surface of the dielectric material to provide an interconnect extending into a dielectric material.
1. A method of forming an interconnect comprising:
providing a sacrificial trace structure using an additive forming method;
forming a seed metal layer on the sacrificial trace structure;
removing the sacrificial trace structure, wherein the seed metal layer remains;
forming an interconnect metal layer on the continuous seed layer;
forming a dielectric material on the interconnect metal layer to encapsulate a majority of the interconnect metal layer, wherein ends of said interconnect metal layer are exposed to provide said interconnect extending through said dielectric material;
forming a solder bump on said ends of the interconnect metal layer; and
bonding said solder bump to a substrate including at least one microprocessor.
2. The method of claim 1 , wherein the sacrificial trace structure is formed using a three dimensional additive method selected from the group consisting of stereolithography, self-propagating waveguide formation, fused deposition modeling (FDM), selective laser sintering (SLS), continuous liquid interface production (CLIP), digital light processing (DLP), material jetting, and combinations thereof.
3. The method of claim 1 , wherein the metal seed layer is composed of a metal selected from the group consisting of nickel, aluminum, copper, tantalum, titanium, platinum, tin, gold, and combinations thereof.
4. The method of claim 1 , wherein removing the sacrificial trace structure comprises dissolving the polymeric material.