Packaging structure of integrated sensor
Provided are an encapsulation structure and encapsulation method for an integrated sensor. The encapsulation structure comprises: a first substrate ( 1 ) and a first outer housing ( 2 ), the first outer housing and first substrate enclosing a first encapsulation cavity; a plurality of sensors arranged inside the first encapsulation cavity, each of the sensors comprising MEMS sensor chips ( 3, 8 ) and ASIC chips ( 5, 7 ) electrically connected to the MEMS sensor chips; inside the first encapsulation cavity, the exterior of the ASIC chip of at least one of the sensors is provided with a shielding structure. Arranging a shielding structure on the exterior of the ASIC chip in the integrated sensor and likely to be subjected to interference causes the ASIC chip to be encapsulated in isolation from other sensor units, preventing the other sensor units in the integrated sensor from interfering with the ASIC chip, and effectively improving the performance of the sensor unit and the overall performance of the integrated sensor.
1. A packaging structure of an integrated sensor, the packaging structure comprising:
a first substrate,
a first shell, the first shell and the first substrate defining a first package cavity in a surrounding manner, and
a plurality of sensors arranged in the first package cavity,
wherein:
each sensor comprises an MEMS sensor chip and an ASIC chip electrically connected to the MEMS sensor chip,
a shielding structure is arranged outside the ASIC chip of at least one sensor and is arranged inside the first package cavity to shield the ASIC chip, and
the shielding structure comprises an insulating adhesive wrapping an electrical connection portion of the ASIC chip and a conductive adhesive shielding cover fully covering the ASIC chip.
2. The structure of claim 1 , wherein:
a bottom of the ASIC chip, outside which the shielding structure is arranged, is electrically connected to a circuit on the first substrate, and
the ASIC chip is electrically connected to a corresponding MEMS sensor chip and an external circuit via the circuit on the first substrate, respectively.
3. The structure of claim 1 , wherein the shielding structure is arranged outside an ASIC chip of a sensitive sensor in the plurality of sensors.
4. The structure of claim 1 , wherein the shielding structure is arranged outside an ASIC chip of a sensor that acts as an interfering source.
5. The structure of claim 1 , wherein at least one of:
the plurality of sensors comprise a pressure sensor, a microphone and a humidity sensor;
the shielding structures are respectively arranged outside ASIC chips of the microphone and the humidity sensor; or
the shielding structure is arranged outside an ASIC chip of the pressure sensor.
6. The structure of claim 1 , wherein the sensors are directly arranged on the first substrate.
7. A packaging structure of an integrated sensor, the packaging structure comprising:
a first substrate,
a first shell, the first shell and the first substrate defining a first package cavity in a surrounding manner, and
a plurality of sensors arranged in the first package cavity,
wherein:
each sensor comprises an MEMS sensor chip and an ASIC chip electrically connected to the MEMS sensor chip,
a shielding structure is arranged outside the ASIC chip of at least one sensor and is arranged inside the first package cavity to shield the ASIC chip,
a bottom of the ASIC chip, outside which the shielding structure is arranged, is electrically connected to a circuit on the first substrate, and
the ASIC chip is electrically connected to a corresponding MEMS sensor chip and an external circuit via the circuit on the first substrate, respectively.
8. The structure of claim 7 , wherein the shielding structure is arranged outside an ASIC chip of a sensitive sensor in the plurality of sensors.
9. The structure of claim 7 , wherein the shielding structure is arranged outside an ASIC chip of a sensor that acts as an interfering source.
10. The structure of claim 7 , wherein at least one of:
the plurality of sensors comprise a pressure sensor, a microphone and a humidity sensor;
the shielding structures are respectively arranged outside ASIC chips of the microphone and the humidity sensor; or
the shielding structure is arranged outside an ASIC chip of the pressure sensor.
11. The structure of claim 7 , wherein the sensors are directly arranged on the first substrate.
12. A packaging structure of an integrated sensor, the packaging structure comprising:
a first substrate,
a first shell, the first shell and the first substrate defining a first package cavity in a surrounding manner, and
a plurality of sensors arranged in the first package cavity,
wherein:
each sensor comprises an MEMS sensor chip and an ASIC chip electrically connected to the MEMS sensor chip, and
a shielding structure is arranged outside the ASIC chip of at least one sensor and is arranged inside the first package cavity to shield the ASIC chip, and
at least one of:
the plurality of sensors comprise a pressure sensor, a microphone and a humidity sensor;
the shielding structures are respectively arranged outside ASIC chips of the microphone and the humidity sensor; or
the shielding structure is arranged outside an ASIC chip of the pressure sensor.
13. The structure of claim 12 , wherein the shielding structure is arranged outside an ASIC chip of a sensitive sensor in the plurality of sensors.
14. The structure of claim 12 , wherein the shielding structure is arranged outside an ASIC chip of a sensor that acts as an interfering source.
15. The structure of claim 12 , wherein the sensors are directly arranged on the first substrate.