IP Library Granted Patent US 10,177,271
Granted Patent B2
US 10,177,271 · App. 15/359,882 · Granted Jan 8, 2019

Photodetectors exploiting electrostatic trapping and percolation transport

Inventors: A. Paul Alivisatos (Berkeley, CA); Miquel Salmeron (Kensington, CA); Yingjie Zhang (Urbana, IL); Daniel J. Hellebusch (Oakland, CA)
Assignee: the Regents of the University of California
H01L31/1872H01L31/02963H01L31/0368H01L31/09H01L31/1136H01L31/1836H01L31/1892Y02E10/50
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Quick Facts
Patent No.
US 10,177,271
App. No.
15/359,882
Granted
Jan 8, 2019
Kind
B2
Abstract

This disclosure provides systems, methods, and apparatus related to photodetectors. In one aspect, a photodetector device comprises a substrate, a polycrystalline layer disposed on the substrate, and a first electrode and a second electrode disposed on the polycrystalline layer. The polycrystalline layer comprises nanograins with grain boundaries between the nanograins. The nanograins comprise a semiconductor material. A doping element comprising a halogen is segregated at the grain boundaries. A length of the polycrystalline layer is between and separating the first electrode and the second electrode.

Claims (36)

1. A method comprising:

(a) fabricating a plurality nanocrystals, the plurality of nanocrystals comprising a semiconductor material, and each nanocrystal of the plurality of nanocrystals having ligands disposed on a surface of the nanocrystal;

(b) exchanging at least some of the ligands on each nanocrystal of the plurality of nanocrystals with a doping element comprising a halogen;

(c) after operations (a) and (b), depositing the plurality of nanocrystals on a substrate;

(d) thermally annealing the plurality of nanocrystals to form a polycrystalline layer comprising nanograins; and

(e) depositing a first electrode and a second electrode on the polycrystalline layer, a length of the polycrystalline layer being between and separating the first electrode and the second electrode.

2. The method of claim 1 , wherein the doping element segregates to grain boundaries in the polycrystalline layer during operation (d).

3. The method of claim 1 , wherein the plurality of nanocrystals comprise a semiconductor material selected from a group consisting of a III-V semiconductor material and a II-VI semiconductor material.

4. The method of claim 1 , wherein the doping element comprises chlorine.

5. The method of claim 1 , wherein operation (d) is performed at about 150° C. to 800° C.

6. The method of claim 1 , wherein operation (d) is performed for about 1 second to 30 minutes.

7. The method of claim 1 , wherein operation (d) is performed in an inert atmosphere.

8. The method of claim 1 , wherein each of the nanograins has a largest dimension of about 10 nanometers to 200 nanometers.

9. The method of claim 1 , wherein the polycrystalline layer has a thickness of about 10 nanometers to 5 microns.

10. The method of claim 1 , wherein the length of the polycrystalline layer between the first electrode and the second electrode is about 50 nanometers to 1 millimeter.

11. A method comprising:

(a) fabricating a plurality nanocrystals, the plurality of nanocrystals comprising cadmium telluride (CdTe), and each nanocrystal of the plurality of nanocrystals having cadmium oleate ligands disposed on a surface of the nanocrystal;

(b) exchanging at least some of the cadmium oleate ligands on each nanocrystal of the plurality of nanocrystals with a doping element comprising chlorine;

(c) after operation (b), depositing the plurality of nanocrystals on a substrate;

(d) thermally annealing the plurality of nanocrystals to form a polycrystalline layer comprising nanograins, the chlorine segregating to grain boundaries in the polycrystalline layer during the thermal annealing; and

(e) depositing a first electrode and a second electrode on the polycrystalline layer, a length of the polycrystalline layer being between and separating the first electrode and the second electrode.

12. The method of claim 11 , wherein operation (b) comprises:

dispersing the plurality of nanocrystals in toluene;

adding tributylphosphine (TBP) to the plurality of nanocrystals dispersed in toluene; and

after adding the tributylphosphine, adding trimethylsilychloride (TMSCl) to the plurality of nanocrystals dispersed in toluene.

13. The method of claim 11 , further comprising:

after operation (d), removing the polycrystalline layer from the substrate; and

depositing the polycrystalline layer on a substrate of a photodetector device.

14. The method of claim 11 , further comprising:

after operation (a), purifying the plurality of nanocrystals by suspending the plurality of nanocrystals in a liquid and separating the plurality of nanocrystals from the liquid.

15. The method of claim 11 , wherein operation (d) is performed at about 350° C.

16. The method of claim 11 , wherein operation (d) is performed for about 30 seconds to 5 minutes.

17. The method of claim 11 , wherein operation (d) is performed in an argon atmosphere.

18. The method of claim 11 , wherein each of the nanograins has a largest dimension of about 50 nanometers to 75 nanometers.

19. The method of claim 11 , wherein the polycrystalline layer has a thickness of about 10 nanometers to 5 microns.

20. The method of claim 11 , wherein the length of the polycrystalline layer between the first electrode and the second electrode is about 50 nanometers to 1 millimeter.

Assignments (2)
CONFIRMATORY LICENSE Recorded Mar 27, 2017
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 042097/0610 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 7, 2017
From: ALIVISATOS, A. PAUL; SALMERON, MIQUEL; ZHANG, YINGJIE; HELLEBUSCH, DANIEL J.
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 041483/0707 →
Continuity (2)
Provisional Application 62259760 · Nov 25, 2015
Related Publication 20170148938A1 · May 25, 2017