X-ray analysis device
Collimator unit between X-ray tube and sample includes a plurality of collimator plates and displacement mechanisms, which move the collimator plates in interlocked fashion so as to locate the centers of through-holes on a line connecting X-ray focal point to an arbitrary point on the sample W, thereby suppressing the shading of X-rays due to the axis of the through-holes of the collimator unit becoming diagonal to the line connecting the X-ray focal point and the point on the sample.
1. An X-ray analysis device, comprising:
an X-ray tube including a collimator unit that irradiates X-rays onto a sample, said collimator unit comprises a plurality of flat collimator plates, each of said collimator plates including a through-hole formed in their thickness direction, the collimator plates are arranged parallel to each other and are configured such that each collimator plate is movable in two orthogonal directions of spread of the plates by driving of an individual displacement mechanism;
an X-ray detector that detects fluorescent X-rays generated due to such irradiation, wherein information concerning elements contained in the sample is obtained from the detection results; and
a controller that drives said displacement mechanisms in interlocked fashion so as to locate the centers of the through-holes of said collimator plates on a line connecting the focal point of said X-ray tube and an arbitrary point on the sample, and so as to move the irradiation location of X-rays from said X-ray tube on the sample by moving each of said collimator plates in the two orthogonal directions such that occurrence of X-ray shadow on the sample is suppressed;
wherein the plurality of flat collimator plates are arranged between the X-ray tube and the sample.
2. The X-ray analysis device according to claim 1 , wherein each of said collimator plates is moved in two orthogonal directions.
3. The X-ray analysis device according to claim 1 , wherein said collimator plates comprises three or more collimator plates.
4. An X-ray analysis method, comprising:
irradiating X-rays onto a sample by an X-ray tube including a collimator unit, said collimator unit comprises a plurality of flat collimator plates, each of said collimator plates including a through-hole formed in their thickness direction, the collimator plates are arranged parallel to each other and are configured such that each collimator plate is movable in two orthogonal directions of spread of the plates by driving of an individual displacement mechanism;
detecting fluorescent X-rays generated due to such irradiation by an X-ray detector, wherein information concerning elements contained in the sample is obtained from the detection results; and
driving said displacement mechanisms in interlocked fashion so as to locate the centers of the through-holes of said collimator plates on a line connecting the focal point of said X-ray tube and an arbitrary point on the sample, and so as to move the irradiation location of X-rays from said X-ray tube on the sample by moving each of said collimator plates in the two orthogonal directions such that occurrence of X-ray shadow on the sample is suppressed;
wherein the plurality of flat collimator plates are arranged between the X-ray tube and the sample.
5. The X-ray analysis method according to claim 4 , wherein each of said collimator plates is moved in two orthogonal directions.
6. The X-ray analysis method according to claim 4 , wherein said collimator plates comprise three or more collimator plates.