Semiconductor structure having etch stop layer and method of forming the same
A semiconductor structure includes a first dielectric layer, a first conductive via, a second conductive via and an etch stop layer. The first conductive via and the second conductive via are respectively disposed in the first dielectric layer. The etch stop layer is disposed on the first dielectric layer and contacts the first and second conductive vias. The etch stop layer includes nitrogen-and-oxygen-doped silicon carbide (NODC).
1. A semiconductor structure having an etch stop layer, the semiconductor structure comprising:
a first dielectric layer;
a first conductive via and a second conductive via respectively disposed in the first dielectric layer; and
an etch stop layer disposed on the first dielectric layer and contacting the first and second conductive via, wherein the etch stop layer comprises nitrogen-and-oxygen-doped silicon carbide (NODC), and the etch stop layer has a first portion and a second portion disposed on the first portion, and a nitrogen content of the first portion is greater than a nitrogen content of the second portion.
2. The semiconductor structure of claim 1 , further comprises a second dielectric layer over the etch stop layer.
3. The semiconductor structure of claim 2 , wherein the first and second dielectric layers respectively comprise phosphosilicate glass (PSG), fluorosilicate glass (FSG), undoped silicate glass (USG), hard black diamond (HBD), extreme low k (ELK) dielectrics, high-stress undoped silicate glass (HSUSG) or a combination thereof.
4. The semiconductor structure of claim 1 , wherein a material forming the first conductive via comprises tungsten, tungsten-based alloys, copper, copper-based alloys or combinations thereof, and a material forming the second conductive via comprises copper, copper-based alloy, tungsten, aluminum, gold, silver or a combination thereof.
5. The semiconductor structure of claim 1 , wherein a thickness of the first portion is substantially no more than 20 Å.
6. The semiconductor structure of claim 1 , wherein the nitrogen content of the first portion is in a range substantially from 5 atomic percent (at. %) to 10 at. %.
7. A method of forming a semiconductor structure having an etch stop layer comprising a first portion and a second portion, wherein a nitrogen content of the first portion is greater than a nitrogen content of the second portion, the method comprising:
providing a structure comprising a first dielectric layer, wherein a first conductive via and a second conductive via are respectively disposed in the first dielectric layer; and
performing a plasma-assisted deposition process on a surface of the structure to deposit an etch stop layer thereon, the plasma-assisted deposition process comprising:
flowing a nitrogen-containing gas to perform a nitrogen pre-treatment over the structure for a predetermined duration; and
flowing a silicon-containing gas and an oxygen-containing gas over the structure, wherein a first portion of the etch stop layer is formed by reacting the nitrogen-containing gas with the silicon-containing gas and the oxygen-containing gas.
8. The method of claim 7 , further comprising depositing a second dielectric layer on the etch stop layer.
9. The method of claim 7 , wherein the predetermined duration is substantially no less than 15 seconds.
10. The method of claim 7 , wherein the nitrogen-containing gas comprises ammonia (NH 3 ).
11. The method of claim 7 , wherein the silicon-containing gas comprises tetramethylsilane (Si(CH 3 ) 4 ), trimethylsilane (SiH(CH 3 ) 3 ) or a combination thereof.
12. The method of claim 7 wherein the oxygen-containing gas comprises carbon dioxide (CO2), oxygen (O2) or a combination thereof.
13. The method of claim 7 , wherein the plasma-assisted deposition process is a plasma enhanced chemical vapor deposition (PECVD) process.
14. The method of claim 7 , wherein flowing the silicon-containing gas and the oxygen-containing gas over the structure further comprises reacting the silicon-containing gas with the oxygen-containing gas, thereby forming a second portion of etch stop layer on the first portion.
15. The method of claim 7 , further comprising depositing a second dielectric layer on the etch stop layer after the etch stop layer is deposited.
16. The method of claim 15 , wherein the structure comprises a substrate layer under the first dielectric layer, and the second conductive via extends into the substrate layer, and the method further comprises:
performing a thinning process on a back surface of the substrate layer, thereby exposing the second conductive via, wherein the back surface is opposite to a surface on which the first dielectric layer is disposed.
17. A semiconductor structure having an etch stop layer, the semiconductor structure comprising:
a substrate layer;
a first dielectric layer disposed on the substrate layer;
a tungsten conductive via disposed in the first dielectric layer;
a copper conductive via disposed in the first dielectric layer and extending through the substrate layer; and
an etch stop layer disposed on the first dielectric layer and contacting the tungsten conductive via and the copper conductive via, the etch stop layer comprising NODC, wherein the etch stop layer has a first portion and a second portion disposed on the first portion, and a nitrogen content of the first portion is greater than a nitrogen content of the second portion.
18. The semiconductor structure of claim 17 , wherein the nitrogen content of the first portion is in a range from substantially 5 at. % to 10 at. %.
19. The semiconductor structure of claim 17 , further comprises a second dielectric layer on the etch stop layer.