Antifuse cell comprising program transistor and select transistor arranged on opposite sides of semiconductor layer
The disclosure relates to a semiconductor structure comprising: a first semiconductor layer, a first program transistor, and a first select transistor implementing a first antifuse cell, wherein the first semiconductor layer acts as the body of the first program transistor and as the body of the first select transistor, wherein a gate of the first program transistor and a gate of the first select transistor are on different sides of the first semiconductor layer.
1. An anti-fuse cell, comprising:
a first semiconductor layer comprising a single connection region;
a breakdown layer located on the first semiconductor layer, wherein the breakdown layer exhibits a first electrical conductivity prior to an electrical breakdown and a second electrical conductivity after the electrical breakdown;
a first program transistor having a program gate and a body comprising the first semiconductor layer; and
a first select transistor having a select gate and a body comprising the first semiconductor layer;
wherein the program transistor is in series with the first select transistor; and
wherein the program gate and the select gate are arranged on opposite sides of the first semiconductor layer and the breakdown layer.
2. The anti-fuse cell of claim 1 , wherein:
the first semiconductor layer comprises a first portion and a second portion separated by the connection region;
the program gate of the first program transistor is located on the first portion of the first semiconductor layer;
a program gate of a second program transistor of a second anti-fuse cell is located on the second portion of the first semiconductor layer; and
the first program transistor is connected in parallel to the second program transistor.
3. The anti-fuse cell of claim 2 , wherein the first program transistor is connected in series with a third program transistor of a third anti-fuse cell, wherein a program gate of the third program transistor is located on the first portion of the first semiconductor layer.
4. The anti-fuse cell of claim 3 , wherein the program gate and a gate oxide of any of the first program transistor, second program transistor, and third program transistor are shaped such that the electric field of the program gate is concentrated on a point or a line of the gate oxide.
5. The anti-fuse cell of claim 4 , wherein the first semiconductor layer comprises an etched region and for any of the first program transistor, the second program transistor, and the third program transistor:
the gate oxide is placed on the first semiconductor layer and at least on a portion of a wall of the etched region; and
the program gate is placed on the gate oxide, so as to realize an angle in correspondence of the etched region.
6. The anti-fuse cell of claim 4 , wherein the second anti-fuse cell and the third anti-fuse cell share the first select transistor.
7. The anti-fuse cell of claim 1 , wherein the program gate and a gate oxide of the first program transistor are shaped such that the electric field of the gate is concentrated on a point or a line of the gate oxide.
8. The anti-fuse cell of claim 7 , wherein the first semiconductor layer comprises an etched region and for the first program transistor:
the gate oxide is placed on the first semiconductor layer and at least on a portion of a wall of the etched region; and
the program gate is placed on the gate oxide, so as to realize an angle in correspondence of the etched region.
9. The anti-fuse cell of claim 1 , further comprising a second program transistor, and wherein the first program transistor, the second program transistor, and the first select transistor are arranged in a NOR configuration.
10. The anti-fuse cell of claim 1 , further comprising a second program transistor, and wherein the first program transistor, the second program transistor, and the first select transistor are arranged in a NAND configuration.
11. The anti-fuse cell of claim 1 , wherein the breakdown layer comprises an insulation layer between the select gate and the first semiconductor layer.
12. The anti-fuse cell of claim 1 , wherein the single connection region facilitates current flow from the program gate, through the first semiconductor layer to a contact on the single connection region upon applying a voltage to the program gate.
13. The anti-fuse cell of claim 1 , wherein the single connection region is arranged to facilitate current flow from the select gate, through the program transistor after electrical breakdown, and to a contact on the single connection region upon application of a voltage at the select gate.