Semiconductor apparatus
A semiconductor apparatus comprises a semiconductor substrate, a dummy trench section which is formed in a front surface of the semiconductor substrate, and a first front-surface-side electrode which is formed above the front surface of the semiconductor substrate and contains metals, and the dummy trench section has a dummy trench formed in the front surface of the semiconductor substrate, an insulation film formed on an inner wall of the dummy trench, a dummy conductive section formed inside the dummy trench on an inner side than the insulation film, and a protection section having an opening to expose at least a part of the dummy conductive section and covering the insulation film on the front surface of the semiconductor substrate, and the first front-surface-side electrode has a portion formed within the opening of the protection section and contacts with the dummy conductive section.
1. A semiconductor apparatus, comprising:
a semiconductor substrate;
a dummy trench section which is formed in a front surface of the semiconductor substrate; and
a first front-surface-side electrode containing metals, which is formed above the front surface of the semiconductor substrate, wherein
the dummy trench section has:
a dummy trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the dummy trench;
a dummy conductive section which is formed, inside the dummy trench, on an inner side of the insulation film; and
a protection section which has an opening to expose a part of an upper surface of the dummy conductive section and covers the insulation film in the front surface of the semiconductor substrate, a width of the opening of the protection section being smaller than a width of the dummy conductive section of the dummy trench,
the first front-surface-side electrode has a portion formed within the opening of the protection section and contacts with the dummy conductive section,
an edge portion of a front surface of the dummy conductive section is arranged in a deeper position than a front surface of an emitter region of the semiconductor substrate, and
the protection section directly covers the edge portion of the front surface of the dummy conductive section.
2. The semiconductor apparatus according to claim 1 , further comprising:
a gate trench section which is formed in the front surface of the semiconductor substrate, wherein
the gate trench section has:
a gate trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the gate trench;
a gate conductive section which is formed, inside the gate trench, on an inner side than the insulation film; and
a gate insulation section which is provided above the gate conductive section and insulates the gate conductive section and the first front-surface-side electrode from each other.
3. The semiconductor apparatus according to claim 2 , wherein
the gate insulation section is provided covering the gate trench in the front surface of the semiconductor substrate, and
the width of the opening formed in the protection section is smaller than a distance between the protection section and the gate insulation section which are provided adjacent to each other.
4. The semiconductor apparatus according to claim 2 , wherein
the first front-surface-side electrode has:
a dummy plug section which is formed of metal and which is formed in the opening of the protection section and contacts with the dummy conductive section; and
an electrode section which is formed above the dummy plug section and which is formed of a metal material different from the dummy plug section.
5. The semiconductor apparatus according to claim 4 , wherein the dummy plug section contains tungsten.
6. The semiconductor apparatus according to claim 4 , wherein
the first front-surface-side electrode further comprises a mesa plug section which is formed of the same material as the dummy plug section, is formed between the protection section and the gate insulation section, and contacts with the front surface of the semiconductor substrate.
7. The semiconductor apparatus according to claim 6 , wherein
the dummy plug section is longer than the mesa plug section in a depth direction.
8. The semiconductor apparatus according to claim 4 , wherein
the dummy trench section is formed extending in a predetermined extending direction in the front surface of the semiconductor substrate, wherein
the gate trench section has:
an opposing section which is formed extending in the extending direction in an area opposed to the dummy trench section; and
a protruding section which is formed further extending from the opposing section in an area not opposed to the dummy trench section,
the semiconductor apparatus further comprises a second front-surface-side electrode which is formed above the protruding section, and
the gate conductive section in the protruding section is electrically connected to the second front-surface-side electrode.
9. The semiconductor apparatus according to claim 8 , wherein
the gate insulation section of the protruding section has an opening to expose the gate conductive section, and
the second front-surface-side electrode has a gate plug section which is formed of metal and which is formed within the opening of the gate insulation section and contacts with the gate conductive section.
10. The semiconductor apparatus according to claim 9 , wherein the gate plug section is formed of the same material as the dummy plug section.
11. The semiconductor apparatus according to claim 9 , wherein
the gate plug section has the same length as the dummy plug section in a depth direction.
12. The semiconductor apparatus according to claim 2 , wherein
the gate insulation section and the protection section are parts of an interlayer insulation film of a single layer formed in a predetermined pattern on the front surface of the semiconductor substrate.
13. The semiconductor apparatus according to claim 2 , wherein
each of the gate insulation section and the protection section is an interlayer insulation film formed in a predetermined pattern on the front surface of the semiconductor substrate, and
the interlayer insulation film is a PSG film or a BPSG film.
14. The semiconductor apparatus according to claim 1 , wherein
a central section of the dummy conductive section has a recessed shape.
15. The semiconductor apparatus according to claim 1 , wherein a contact hole of the dummy trench section is provided between contact holes of adjacent mesa portions.
16. A semiconductor apparatus, comprising:
a semiconductor substrate;
a dummy trench section which is formed in a front surface of the semiconductor substrate;
a first front-surface-side electrode containing metals, which is formed above the front surface of the semiconductor substrate; and
a gate trench section which is formed in the front surface of the semiconductor substrate;
wherein
the dummy trench section has:
a dummy trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the dummy trench;
a dummy conductive section which is formed, inside the dummy trench, on an inner side of the insulation film; and
a protection section which has an opening to expose at least a part of the dummy conductive section and covers the insulation film in the front surface of the semiconductor substrate,
the first front-surface-side electrode has a portion formed within the opening of the protection section and contacts with the dummy conductive section,
an edge portion of a front surface of the dummy conductive section is arranged in a deeper position than a front surface of an emitter region of the semiconductor substrate,
the protection section directly covers the edge portion of the front surface of the dummy conductive section,
the gate trench section has:
a gate trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the gate trench;
a gate conductive section which is formed, inside the gate trench, on an inner side than the insulation film; and
a gate insulation section which is provided above the gate conductive section and insulates the gate conductive section and the first front-surface-side electrode from each other,
the first front-surface-side electrode has:
a dummy plug section which is formed of metal and which is formed in the opening of the protection section and contacts with the dummy conductive section; and
an electrode section which is formed above the dummy plug section and which is formed of a metal material different from the dummy plug section, and
the first front-surface-side electrode further comprises a mesa plug section which is formed of the same material as the dummy plug section, is formed between the protection section and the gate insulation section, and contacts with the front surface of the semiconductor substrate.
17. A semiconductor apparatus, comprising:
a semiconductor substrate;
a dummy trench section which is formed in a front surface of the semiconductor substrate;
a first front-surface-side electrode containing metals, which is formed above the front surface of the semiconductor substrate; and
a gate trench section which is formed in the front surface of the semiconductor substrate;
wherein
the dummy trench section has:
a dummy trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the dummy trench;
a dummy conductive section which is formed, inside the dummy trench, on an inner side of the insulation film; and
a protection section which has an opening to expose at least a part of the dummy conductive section and covers the insulation film in the front surface of the semiconductor substrate,
the first front-surface-side electrode has a portion formed within the opening of the protection section and contacts with the dummy conductive section,
an edge portion of a front surface of the dummy conductive section is arranged in a deeper position than a front surface of an emitter region of the semiconductor substrate,
the protection section directly covers the edge portion of the front surface of the dummy conductive section,
the gate trench section has:
a gate trench which is formed in the front surface of the semiconductor substrate;
an insulation film which is formed on an inner wall of the gate trench;
a gate conductive section which is formed, inside the gate trench, on an inner side than the insulation film; and
a gate insulation section which is provided above the gate conductive section and insulates the gate conductive section and the first front-surface-side electrode from each other,
the first front-surface-side electrode has:
a dummy plug section which is formed of metal and which is formed in the opening of the protection section and contacts with the dummy conductive section; and
an electrode section which is formed above the dummy plug section and which is formed of a metal material different from the dummy plug section,
the dummy trench section is formed extending in a predetermined extending direction in the front surface of the semiconductor substrate,
the gate trench section has:
an opposing section which is formed extending in the extending direction in an area opposed to the dummy trench section; and
a protruding section which is formed further extending from the opposing section in an area not opposed to the dummy trench section,
the semiconductor apparatus further comprises a second front-surface-side electrode which is formed above the protruding section, and
the gate conductive section in the protruding section is electrically connected to the second front-surface-side electrode.