Corrosion-resistant member and electrostatic chuck device
Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10 −10 m or more.
1. A corrosion-resistant member comprising
a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium,
wherein the rare earth metal element other than samarium has an ionic radius of 0.88×10 −10 m or more, and
a crystal phase of the composite oxide sintered compact is (i) an orthorhombic perovskite phase or (ii) an orthorhombic perovskite phase and a rare earth metal element other than samarium.
2. The corrosion-resistant member according to claim 1 ,
wherein a ratio (N RE /(N SM +N RE )) of the number of atoms of the rare earth metal element other than samarium (N RE ) to the sum (N SM +N RE ) of the number of atoms of samarium (N SM ) and the number of atoms of the rare earth metal element other than samarium (N RE ) in the composite oxide is 0.01 or higher and 0.5 or lower.
3. The corrosion-resistant member according to claim 1 ,
wherein the rare earth metal element other than samarium is one element or two or more elements selected from the group consisting of yttrium, lanthanum, praseodymium, neodymium, europium, gadolinium, terbium, dysprosium, holmium, erbium, and thulium.
4. The corrosion-resistant member according to claim 1 ,
wherein a dielectric constant at a frequency of 1 MHz or lower is 13 or higher,
a dielectric loss at a frequency of 1 MHz or lower is 0.2 or lower, and
volume resistivity is 1×10 14 Ω·cm or higher.
5. An electrostatic chuck device comprising:
a ceramic plate-shaped body that has a first main surface which is a placement surface on which a sample is placed; and
an internal electrode for electrostatic adsorption that is provided on a second main surface of the ceramic plate-shaped body,
wherein the ceramic plate-shaped body is formed of the corrosion-resistant member according to claim 1 .
6. The electrostatic chuck device according to claim 5 , further comprising:
a cooling base portion that cools the ceramic plate-shaped body and the internal electrode for electrostatic adsorption; and
a heating member that is provided between the internal electrode for electrostatic adsorption and the cooling base portion.