Curable resin composition, resin mold for imprinting, method for photo imprinting, method for manufacturing semiconductor integrated circuit, and method for manufacturing fine optical element
A curable resin composition comprising: a fluorinated urethane(meth)acrylate represented by formula (1), wherein, R 1 , R 2 , R 3 and R 4 each independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10; R 3 and R 4 each independently represents the hydrogen atom when x and y are both 1; R 3 represents the hydrogen atom and R 4 represents the methyl group when x is 1 and y is 2; R 3 represents the methyl group and R 4 represents the hydrogen atom when x is 2 and y is 1; and R 3 and R 4 each independently represents the methyl group when x and y are both 2.
1. A curable resin composition comprising:
a fluorinated urethane(meth)acrylate represented by formula (1),
wherein:
each of R 1 , R 2 , R 3 and R 4 independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer within the range of 1 to 10;
each of R 3 and R 4 independently represents the hydrogen atom when x and y are both 1;
R 3 represents the hydrogen atom and R 4 represents the methyl group when x is 1 and y is 2;
R 3 represents the methyl group and R 4 represents the hydrogen atom when x is 2 and y is 1; and
each of R 3 and R 4 independently represents the methyl group when x and y are both 2.
2. The curable resin composition according to claim 1 , having photocurability.
3. The curable resin composition according to claim 2 , comprising a photopolymerization initiator.
4. A resin mold for imprinting, produced by curing the curable resin composition according to claim 1 .
5. A method for manufacturing a semiconductor integrated circuit, the method comprising:
utilizing the resin mold of claim 4 to manufacture the semiconductor integrated circuit.
6. A method for manufacturing a fine optical element, the method comprising:
utilizing the resin mold of claim 4 to manufacture the fine optical element.
7. A resin for imprinting, produced by a process comprising curing the curable resin composition according to claim 1 .
8. A fluorinated urethane(meth)acrylate compound represented by formula (1),
wherein:
each of R 1 , R 2 , R 3 and R 4 independently represents a hydrogen atom or a methyl group;
each of x and y independently represents 1 or 2, and n represents an integer within the range of 1 to 10;
each of R 3 and R 4 independently represents the hydrogen atom when x and y are both 1;
R 3 represents the hydrogen atom and R 4 represents the methyl group when x is 1 and y is 2;
R 3 represents the methyl group and R 4 represents the hydrogen atom when x is 2 and y is 1; and
each of R 3 and R 4 independently represents the methyl group when x and y are both 2.
9. A photocurable resin composition comprising:
a photopolymerization initiator, and
a fluorinated urethane(meth)acrylate represented by formula (1):
wherein:
each of R 1 , R 2 , R 3 and R 4 independently represents a hydrogen atom or a methyl group, x and y each independently represents 1 or 2, and n represents an integer of from 1 to 10;
each of R 3 and R 4 independently represents a hydrogen atom when x and y are both 1;
R 3 represents a hydrogen atom and R 4 represents a methyl group when x is 1 and y is 2;
R 3 represents a methyl group and R 4 represents a hydrogen atom when x is 2 and y is 1; and
each of R 3 and R 4 independently represents a methyl group when x and y are both 2.