IP Library › Granted Patent US 10,192,892
Granted Patent B2
US 10,192,892 · App. 14/725,472 · Granted Jan 29, 2019

Active matrix backplane formed using thin film optocouplers

Inventors: JengPing Lu (Fremont, CA); David K. Biegelsen (Portola Valley, CA); Patrick Yasuo Maeda (San Jose, CA)
Assignee: Palo Alto Research Center Incorporated
H01L27/124G02B26/0833G03B21/008H01L31/16
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Quick Facts
Patent No.
US 10,192,892
App. No.
14/725,472
Filed
May 29, 2015
Granted
Jan 29, 2019
Kind
B2
Art Unit
2826
USPC
257/290
Abstract

A device includes a backplane having multiple output terminals arranged in an array on an output surface of the backplane. The device further includes an active matrix array comprising thin film solid state optical switches coupled respectively between an input terminal of the backplane and the output terminals. Storage capacitors may be coupled respectively to the output terminals. A pixelated light source provides pixelated light that controls the optical switches.

Claims (53)

1. A device comprising:

a backplane, comprising:

multiple output terminals arranged on an output surface of the backplane;

an optocoupler active matrix array, comprising:

thin film solid state optical switches coupled respectively between an input terminal of the backplane and the output terminals, the optical switches and the output terminals arranged in an array; and

storage capacitors coupled respectively to the output terminals; and

a pixelated light source configured to provide pixelated light that controls the optical switches.

2. The device of claim 1 , wherein the pixelated light source comprises:

at least one light generating device configured to provide a light beam;

at least one mirror; and

a movement mechanism configured to provide movement of the mirror along at least two dimensions.

3. The device of claim 1 , wherein the pixelated light source comprises multiple light generating devices, each of the multiple light generating devices arranged to control at least one of the optical switches.

4. The device of claim 1 , wherein the pixelated light source comprises:

at least one light generating device; and

a micro mirror array comprising multiple rotatable micro mirrors.

5. The device of claim 1 , wherein the pixelated light source comprises a flat panel display, wherein each pixel of the flat panel display corresponds to a pixel of the active matrix array.

6. The device of claim 5 , wherein an array of optical devices is disposed between the flat panel display and the active matrix array.

7. The device of claim 6 , wherein the array of optical devices comprises at least one of a microlens array, a selfoc lens array, and a pinhole array.

8. The device of claim 1 , wherein:

the optical switches are arranged in pixel groups, each pixel group including at least a first optical switch coupled to a first input and a second optical switch coupled to a second input, the first and second optical switches connected to a common output terminal and capable of being individually activated by the pixelated light source.

9. The device of claim 1 , wherein:

the optical switches are arranged in pixel groups, each pixel group including at least a first optical switch coupled to a first input and a second optical switch coupled to a second input, the first and second optical switches connected to a common output terminal;

a first optical filter having a first passband color arranged between the pixelated light source and the first optical switch;

a second optical filter having a second passband color arranged between the pixelated light source and the second optical switch; and,

wherein the pixelated light source is configured to activate the first optical switch by emitting the first color and to activate the second optical switch by emitting the second color.

10. A device comprising:

a backplane, comprising:

at least one input terminal; and

multiple output terminals arranged in an array on an output surface of the backplane;

a voltage source coupled to the at least one input terminal and configured to provide a time varying input voltage at the at least one input terminal; and

an active matrix array configured to provide multiple voltage levels at the outputs based on the time varying input voltage, comprising:

thin film solid state optical switches coupled respectively between the at least one input terminal and the output terminals, each optical switch comprising:

a layer of photo sensitive material that extends laterally;

first and second electrodes spaced apart laterally from one another along the layer of photo sensitive material, the first and second electrodes contacting the photo sensitive material at first and second junctions, respectively; and

at least one field plate separated from the photo sensitive material by at least one insulator region and extending laterally along the layer of photo sensitive material and beyond the first or second junction, wherein the at least one field plate is electrically connected to the first electrode or the second electrode.

11. The device of claim 10 , further comprising storage capacitors coupled to each of the output terminals.

12. The device of claim 10 , wherein the optical switches are arranged in pixel groups, each pixel group including at least a first optical switch coupled to a first input terminal and a second optical switch coupled to a second input terminal, the first and second optical switches connected to a common output terminal; and

the voltage source is configured to provide a first input voltage, V i1 , at a first input terminal and to provide a second input voltage, V i2 , at a second input terminal.

13. The device of claim 12 , wherein the active matrix array is configured to provide multiple voltage levels at the outputs, wherein the multiple voltage levels are between the first and second input voltages.

14. The device of claim 10 , wherein the optical switches are arranged in pixel groups, each pixel group arranged to convert a digital input signal to an analog output signal.

15. A device comprising:

a backplane, comprising:

multiple output terminals arranged in an array on an output surface of the backplane; and

an active matrix array, comprising:

thin film solid state optical switches coupled respectively between at least one input terminal of the backplane and the output terminals, wherein each optical switch is configured to be individually addressed by on/off control of a pixel of a pixelated light source and comprises:

a layer of photo sensitive material that extends laterally;

first and second electrodes spaced apart laterally from one another along the layer of photo sensitive material, the first and second electrodes contacting the photo sensitive material at first and second junctions, respectively; and

at least one field plate separated from the photo sensitive material by at least one insulator region and extending laterally along the layer of photo sensitive material and beyond the first or second junction, wherein the at least one field plate is electrically connected to the first electrode or the second electrode.

16. The device of claim 15 , wherein:

the device further comprises a voltage source coupled to the at least one terminal;

the at least one input terminal comprises a first input terminal and a second input terminal; and

the voltage source is configured to provide a periodically changing voltage at the first input terminal and to provide a constant voltage at the second input terminal.

17. The device of claim 16 , wherein the second input terminal is held at 0V.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073562/0677 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 29, 2015
From: LU, JENGPING; BIEGELSEN, DAVID K.; MAEDA, PATRICK YASUO
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 035747/0169 →
Continuity (1)
Related Publication 20160351584A1 · Dec 1, 2016