Three-dimensional semiconductor device

1. A three:-dimensional (3D) semiconductor device comprising:

a substrate including a cell array region and a connection region;

a stack structure extending from the cell array region into the connection region, the stack structure including a first stack and a second stack on the first stack, each of the first and second stacks extending along a first direction and including a first electrode and a second electrode on the first electrode; and

contact plugs connected to the second electrodes of the first and second stacks, respectively,

wherein, in the first direction, a sidewall of the second electrode of the first stack is horizontally spaced apart from a sidewall of the second electrode of the second stack by a first distance in the connection region,

wherein, in the first direction, a sidewall of the first electrode is horizontally spaced apart from the sidewall of the second electrode by a second distance in each of the first and second stacks,

wherein the second distance is less than a half of the first distance,

wherein the sidewall of the first electrode of the second stack is horizontally spaced apart from the sidewall of the second electrode of the first stack by a third distance,

wherein the second distance in the second stack is less than the third distance, and

wherein each of the contact plugs has a width greater than the second distance.

2. The 3D semiconductor device of claim 1 , wherein the sidewalls of the first and second electrodes are disposed between the contact plugs adjacent to each other.

3. The 3D semiconductor device of claim 1 , wherein each of the first and second stacks further includes a third electrode disposed between the first and second electrodes, and

wherein a sidewall of the third electrode is horizontally spaced apart from the sidewalls of the first and second electrodes.

4. The 3D semiconductor device of claim 1 , wherein each of the first and second stacks further includes a third electrode disposed between the first and second electrodes, and

wherein a sidewall of the third electrode is vertically aligned with the sidewall of the first electrode or the sidewall of the second electrode.

5. The 3D semiconductor device of claim 1 , wherein the sidewalk of the first and second electrodes are inclined to top surfaces of the first and second electrodes, respectively, in each of die first and second stacks.

6. The 3D semiconductor device of claim 1 , wherein each of the first and second stacks includes a pad portion disposed in the connection region,

wherein the pad portions of the first and second stacks are disposed at positions vertically and horizontally different from each other,

wherein the stack structure has a sidewall profile of a first stepwise structure defined by the pad portions of the first and second stacks,

wherein the pad portion of each of the first and second stacks has a sidewall profile of a second stepwise structure defined by the first and second electrodes,

wherein the first stepwise structure has a first inclination angle with respect to a top surface of the substrate,

wherein the first inclination angle is smaller than 90 degrees,

wherein the second stepwise structure has a second inclination angle with respect to the top surface of the substrate, and

wherein the second inclination angle is greater than the first inclination angle and smaller than 90 degrees.

7. The 3D semiconductor device of claim 1 , further comprising:

a plurality of vertical structures penetrating the stack structure in the cell array region; and

a data storage layer disposed between the stack structure and each of the vertical structures.

8. A three-dimensional (3D) semiconductor device comprising:

a substrate including a cell array region and a connection region;

a plurality of stacks vertically stacked on the substrate, each of the plurality of stacks having a pad portion disposed in the connection region, and the each of the plurality of stacks including a plurality of electrodes vertically stacked; and

contact plugs connected to the pad portions of the plurality of stacks, respectively,

wherein ends of top surfaces of the pad portions of the plurality of stacks are horizontally spaced apart from each other by a first distance,

wherein, in at least one of the pad portions of the plurality of stacks, a sidewall of an uppermost electrode of the plurality of electrodes is horizontally spaced apart from a sidewall of a lowermost electrode of the plurality of electrodes by a second distance,

wherein the second distance is less than a half of the first distance, and

wherein each of the contact plugs has a width greater than the second distance.

9. The 3D semiconductor device of claim 8 ,

wherein the contact plugs are in contact with top surfaces of uppermost electrodes of the pad portions, respectively.

10. The 3D semiconductor device of claim 9 , wherein sidewalls of the plurality of electrodes of each of the pad portions are disposed between the contact plugs adjacent to each other.

11. The 3D semiconductor device of claim 8 , wherein, in another of the pad portions, a sidewall of another lowermost electrode of the plurality of electrodes is vertically aligned with a sidewall of another uppermost electrode of the plurality of electrodes.

12. The 3D semiconductor device of claim 8 , wherein the at least one of the pad portions includes a first electrode, a second electrode, and a third electrode which are sequentially stacked,

wherein a sidewall of the first electrode is horizontally spaced apart from a sidewall of the third electrode by the second distance, and

wherein a sidewall of the second electrode is horizontally spaced apart from the sidewall of the first electrode and the sidewall of the third electrode.

13. The 3D semiconductor device of claim 8 , wherein the at least one of the pad portions includes a first electrode, a second electrode, and a third electrode which are sequentially stacked,

wherein a sidewall of the first electrode is horizontally spaced apart from a sidewall of the third electrode by the second distance, and

wherein a sidewall of the second electrode is vertically aligned with the sidewall of the first electrode or the sidewall of the third electrode.

14. The 3D semiconductor device of claim 8 , wherein the pad portions include first pad portions and second pad portions,

wherein a number of the plurality of electrodes included in each of the second pad portions is less than a number of the plurality of electrodes included in each of the first pad portions, and

wherein, in the first or second pad portions, a sidewall of an uppermost electrode is horizontally spaced apart from a sidewall of a lowermost electrode by the second distance.

15. A three-dimensional (3D) semiconductor device comprising:

a substrate including a cell array region and a connection region;

a stack structure extending in one direction on the substrate, the stack structure including first electrodes and second electrodes that are alternately and vertically stacked on the substrate with an insulating layer interposed therebetween; and

contact plugs connected to the second end portion of each of the second electrodes, respectively,

wherein each of the first electrodes has a first end portion exposed by each of the second electrodes disposed on each of the first electrodes in the connection region,

wherein each of the second electrodes has a second end portion exposed by each of the first electrodes disposed on each of the second electrodes in the connection region,

wherein the first end portion of each of the first electrodes has a first width in the one direction,

wherein the second end portion of each of the second electrodes has a second width in the one direction,

wherein the first width is less than a half of the second width,

wherein each of the contact plugs has a width that is greater than the first width and smaller than the second width.