IP Library Granted Patent US 10,212,798
Granted Patent B2
US 10,212,798 · App. 15/882,415 · Granted Feb 19, 2019

Torch for inductively coupled plasma

Inventors: Sina Alavi (North York, CA); Javad Mostaghimi (Mississauga, CA)
H05H1/30G01J3/443G01N21/73H01J49/105H05H1/46
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Quick Facts
Patent No.
US 10,212,798
App. No.
15/882,415
Granted
Feb 19, 2019
Kind
B2
Abstract

A torch for use in inductively coupled plasma is described. In the torch, a torch tube has an angular accelerator where a flow of gas experiences an increase in angular velocity. The torch tube also has a conical end where the increased angular velocity of the gas is encouraged to accelerate into a cavity that can support the plasma. In various examples, the conical end of the torch tube comprising a conical gap that accelerates the axial velocity component of the gas flow.

Claims (31)

1. A torch for inductively coupled plasma, the torch comprising:

a torch tube having a support end and a conical end, wherein a portion of the conical end defines a cavity for confining the inductively coupled plasma;

an injector tube positioned within the torch tube, wherein the injector tube includes an injector inlet end for receiving a sample flow and an injector conical end; and

an annular channel defined between an outer wall of the injector tube and an inner wall of the torch tube, wherein the torch tube further comprises a gas inlet for receiving a gas flow.

2. The torch of claim 1 , wherein the gas inlet is configured to direct the gas flow into the annular channel with an angular velocity.

3. The torch of claim 2 , wherein the torch tube further comprises an elongated neck between the gas inlet and the conical end, wherein the elongated neck defines an angular accelerator that increases the angular velocity of the gas flow.

4. The torch of claim 3 , wherein the angular accelerator tapers from a wider diameter to a narrower diameter at the elongated neck.

5. The torch of claim 1 , wherein the injector tube is positioned concentrically within the torch tube along a central axis of the torch tube.

6. The torch of claim 1 , wherein the outer wall of the injector tube at the injector conical end comprises an injector conical geometry defined by an increase in outer diameter in a downstream direction away from the injector inlet end, and wherein the conical geometry has an injector conical ratio.

7. The torch of claim 6 , wherein the conical ratio is in the range of about 0.1 to about 1.5.

8. The torch of claim 7 , wherein the conical ratio is in the range of about 0.3 to about 0.6.

9. The torch of claim 8 , wherein the conical ratio is about 0.3.

10. The torch of claim 6 , wherein the inner wall of the torch tube comprises a conical geometry having a conical ratio that is parallel the injector conical ratio.

11. The torch of claim 1 , wherein the conical end comprises an axially straight portion, and wherein the cavity is defined in part by the axially straight portion.

12. The torch of claim 1 , wherein a conical gap is defined by the annular channel between the conical end and the injector conical end, wherein the conical gap extends through at least a portion of the conical end such that the gas flow through the conical gap is parallel to at least the portion of the conical end, and wherein the conical gap is configured to axially accelerate the gas flow.

13. The torch of claim 12 , wherein the conical gap is approximately 1 mm.

14. The torch of claim 1 , wherein the support end of the torch tube upstream from the gas inlet is closed around the injector tube.

15. The torch of claim 1 , wherein the torch is coupled to a mass spectrometer.

16. The torch of claim 1 , wherein the torch is coupled to an optical emission spectrometer.

17. A method of using a torch for inductively coupled plasma, comprising:

positioning a conical end of a torch within a radio frequency (RF) load coil, wherein the torch comprises:

a torch tube having a support end and the conical end, wherein a portion of the conical end defines a cavity for confining the inductively coupled plasma;

an injector tube positioned within the torch tube, wherein the injector tube includes an injector inlet end for receiving a sample flow and an injector conical end; and

an annular channel defined between an outer wall of the injector tube and an inner wall of the torch tube, wherein the torch tube further comprises a gas inlet;

supplying a flow of gas to the gas inlet; and

operating the RF load coil to generate a plasma ball at the cavity.

18. The method of claim 17 , wherein supplying the flow of gas to the gas inlet comprises directing the gas into the annular channel of the torch with an angular velocity.

19. The method of claim 17 , wherein supplying the flow of gas to the gas inlet comprises flowing the gas in a spiral path within the annular channel.

20. The method of claim 17 , wherein the plasma ball is generated at the cavity with a single gas flow, and wherein the single gas flow is the flow of gas.

21. The method of claim 17 , further comprising delivering a sample to the plasma ball using the injector tube and analyzing the delivered sample using mass spectrometry.

22. The method of claim 17 , further comprising delivering a sample to the plasma ball using the injector tube and analyzing the delivered sample using optical emission spectrometry.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 7, 2020
From: MOSTAGHIMI, JAVAD; ALAVI, SINA
To: 2704304 ONTARIO LIMITED
Reel/Frame 052326/0986 →
Continuity (3)
Provisional Application 62452083 · Jan 30, 2017
Provisional Application 62614892 · Jan 8, 2018
Related Publication 20180220520A1 · Aug 2, 2018