Sensor element for detecting at least one property of a measured gas in a measured gas chamber, and method for manufacturing the same
A sensor element for detecting a level of a gas component in the measured gas or a temperature of the measured gas. The sensor element includes at least one solid electrolyte layer. The solid electrolyte layer has at least one plated-through hole. The sensor element further includes a conductive element, which produces an electrically conductive connection through the plated-through hole. In the plated-through hole, the solid electrolyte layer is electrically insulated from the conductive element by an insulating element. At least one opening region of the plated-through hole is stabilized against phase transition by a stabilizing element. The stabilizing element is made at least partially of a material, which includes a noble metal and an element selected from the group consisting of: V, Nb, Ta, Sb, Bi, Cr, Mo, W. A method for manufacturing the sensor element is also provided.
1. A sensor element for detecting a level of a gas component in a measured gas or a temperature of the measured gas, the sensor element comprising:
at least one solid electrolyte layer, the solid electrolyte layer having at least one plated-through hole; and
a conductive element which produces an electrically conductive connection through the plated-through hole, from an upper side of the solid electrolyte layer to a lower side of the solid electrolyte layer, wherein in the plated-through hole, the solid electrolyte layer is electrically insulated from the conductive element by an insulating element;
wherein at least one opening region of the plated-through hole is stabilized against phase transition by a stabilizing element, the stabilizing element being made at least partially of a material, which includes a noble metal and an element selected from the group consisting of V, Nb, Ta, Sb, Bi, Cr, Mo, and W, and
wherein the stabilizing element surrounds the opening region one of: (i) completely in a circumferential direction, or (ii) annularly.
2. The sensor element as recited in claim 1 , wherein the noble metal is platinum.
3. The sensor element as recited in claim 1 , wherein a level of the element in the material is from 2% by weight to 10% by weight.
4. The sensor element as recited in claim 1 , wherein the element is present in the form of at least one compound selected from the group consisting of oxide, oxychloride, carbonate, carbide and chloride.
5. The sensor element as recited in claim 1 , wherein the stabilizing element surrounds the opening region completely in the circumferential direction.
6. The sensor element as recited in claim 1 , wherein the stabilizing element surrounds the opening region annularly.
7. The sensor element as recited in claim 1 , wherein the insulating element is made at least partially of a material, which is an oxidic dielectric.
8. A method for manufacturing a sensor element for detecting a level of a gas component in the measured gas or a temperature of the measured gas, comprising:
providing at least one solid electrolyte layer;
introducing at least one plated-through hole into the solid electrolyte layer, the plated-through hole extending from an upper side of the solid electrolyte layer to a lower side of the solid electrolyte layer;
introducing an insulating paste into the plated-through hole;
introducing a conductive paste into the plated-through hole;
depositing a stabilizing paste against phase transition onto at least one opening region of the plated-through hole, the stabilizing paste including a material, which has a noble metal and an element selected from the group consisting of V, Nb, Ta, Sb, Bi, Cr, Mo, and W; and
sintering the sensor element with at least one of the insulating paste, the conductive paste, and the stabilizing paste;
wherein the stabilizing paste is deposited so that it surrounds the opening region annularly.
9. The method as recited in claim 8 , wherein a level of the element in the material is from 2% by weight to 10% by weight.
10. The method as recited in claim 8 , wherein the element is present in the form of at least one compound selected from the group consisting of oxide, oxychloride, carbonate, carbide and chloride.
11. The method as recited in claim 8 , wherein the stabilizing paste is deposited prior to introducing the insulating paste, and the insulating paste is introduced prior to introducing the conductive paste.
12. The method as recited in claim 8 , wherein the stabilizing paste is deposited using a printing method.
13. The method as recited in claim 8 , wherein at least one of the insulating paste and the conductive paste is introduced using at least one vacuum suction method.