Vacuum pump
A vacuum pump comprises a rotor shaft, which bears one or more rotor elements. The rotor shaft is driven by an electrical driver. A stator is arranged between the rotor elements. The rotor shaft is supported by bearings. The highly heat-generating components such as the driver and the stator are connected to a second housing part in particular by means of a support member. Heat-sensitive components such as the bearing are supported by means of a separate first housing part. The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing can be reduced, and therefore the service life can be extended.
1. A vacuum pump, comprising:
rotor elements connected with a rotor shaft,
at least one stator cooperating with the rotor elements,
an electric driver that drives the rotor shaft,
bearings supporting the rotor shaft, and
a housing having a first housing part and a second housing part, wherein heat-sensitive components are connected with the first housing part and heat-generating components are connected to the second housing part,
wherein the second housing part is connected with the electric driver in a thermally conductive manner via a support member.
2. The vacuum pump of claim 1 , wherein the support member is connected at least with a portion of the at least one stator, the portion being selected from the group consisting of a Holweck stage, a Siegbahn stage, a Gaede stage, and a side-channel compressor.
3. The vacuum pump of claim 1 , wherein the second housing part is connected with the support member and/or the electric driver and/or the at least one stator in a thermally conductive manner.
4. The vacuum pump of claim 1 , wherein the first housing part is connected with one of the bearings.
5. The vacuum pump of claim 4 , wherein the one of the bearings is a pressure-side bearing.
6. The vacuum pump of claim 1 , wherein the first housing part is connected with a controller.
7. The vacuum pump of claim 1 , wherein the first housing part and the second housing part are connected via a connection of low thermal conductivity.
8. The vacuum pump of claim 1 , wherein the first housing part and the second housing part are thermally decoupled from each other.
9. The vacuum pump of claim 1 , wherein the first housing part is connected with a separate cooler device.