Piezoelectric vibrator and piezoelectric vibration device
A piezoelectric vibrator that includes first and second vibration portions that vibrate with mutually reverse phases. Each of the vibration portions includes a silicon layer, a first piezoelectric layer and a second piezoelectric layer that has polarization in an opposite direction to a direction of polarization of the first piezoelectric layer. First and second electrodes are disposed on opposite sides of the second piezoelectric layer. The piezoelectric vibrator has a structure such that a first potential is applied to the first electrode of the first vibration portion and the second electrode of the second vibration portion, and a second potential is applied to the second electrode of the first vibration portion and the first electrode of the second vibration portion.
1. A piezoelectric vibrator comprising:
a first vibration member; and
a second vibration member that vibrates with a mutually reverse phase to the first vibration member,
wherein each of the first and second vibration members includes:
a silicon layer,
a first piezoelectric layer disposed above the silicon layer,
a first electrode disposed on the first piezoelectric layer on a side opposite the silicon layer,
a second piezoelectric layer disposed on the first electrode on a side opposite the first piezoelectric layer and having polarization in an opposite direction to a direction of polarization of the first piezoelectric layer, and
a second electrode disposed on the second piezoelectric layer on a side opposite the first electrode,
wherein the first electrode of the first vibration member and the second electrode of the second vibration member are electrically connected to each other such that a first potential can be applied thereto, and
wherein the second electrode of the first vibration member and the first electrode of the second vibration member are electrically connected to each other such that a second potential can be applied thereto.
2. The piezoelectric vibrator according to claim 1 , further comprising:
a holding structure comprising silicon,
wherein the first vibration member comprises a first rectangular vibration arm extending from the holding structure, and
the second vibration member comprises a second rectangular vibration arm extending from the holding structure in parallel to the first rectangular vibration arm.
3. The piezoelectric vibrator according to claim 2 , wherein the first and second vibration arms are configured to vibrate with mutually reverse phases in a vertical direction relative to a plane of a direction in which the first and second vibration arms extend.
4. The piezoelectric vibrator according to claim 1 , further comprising:
a holding structure comprising silicon,
wherein the first and second vibration members comprise rectangular vibration arms adjacent to each other and extending from the holding structure in parallel to each other.
5. The piezoelectric vibrator according to claim 4 , wherein the vibration arms are configured to vibrate in an in-plane direction of a plane parallel to a principal surface of the first and second vibration members.
6. The piezoelectric vibrator according to claim 5 , wherein the first and second vibration arms are configured to vibrate with mutually reverse phases in the in-plane direction of the plane parallel to the principal surface of the first and second vibration members.
7. The piezoelectric vibrator according to claim 1 , wherein the first and second vibration members are disposed adjacent to each other and extend in a first direction, and the first and second vibration members are configured to vibrate with mutually reverse phases in the first direction.
8. The piezoelectric vibrator according to claim 1 , wherein each of the first and second vibration members further includes a third electrode disposed between the silicon layer and the first piezoelectric layer.
9. The piezoelectric vibrator according to claim 8 , wherein the third electrode of the first vibration member and the third electrode of the second vibration member have a same potential.
10. The piezoelectric vibrator according to claim 9 , wherein the third electrode is a floating electrode.
11. The piezoelectric vibrator according to claim 1 , wherein each of the first and second vibration members further includes an insulation layer comprising a silicon oxide.
12. A piezoelectric vibration device comprising:
the piezoelectric vibrator according to claim 1 ;
a cover that covers the piezoelectric vibrator; and
an outer electrode disposed on an outside of the cover.
13. The piezoelectric vibrator according to claim 1 , further comprising:
a holding structure comprising silicon,
wherein the first vibration member comprises a pair of first rectangular vibration arms extending from the holding structure, and
the second vibration member comprises at least one second rectangular vibration arm extending from the holding structure in parallel to the first rectangular vibration arm and between the pair of first vibration arms.
14. The piezoelectric vibrator according to claim 13 , wherein the pair of first vibration arms and the at least one second vibration arm are configured to vibrate with mutually reverse phases with respect to each other.
15. The piezoelectric vibrator according to claim 1 , further comprising:
an outer frame; and
a pair of connecting arms configure to hold the first and second vibration members within the frame.
16. The piezoelectric vibrator according to claim 15 ,
wherein the first vibration member comprises at least three first vibration portions, with the first electrode of each first vibration portion electrically coupled to each other, and
wherein the second vibration member comprises at least a pair of second vibration portions interposed between the at least three first vibration portions, respectively, with the first electrode of each second vibration portion electrically coupled to each other.
17. A piezoelectric vibrator comprising:
a holding structure;
a pair of first vibration arms extending from the holding structure; and
at least one second vibration arm extending from the holding structure in parallel to the first rectangular vibration arm and between the pair of first vibration arms, the at least one second vibration arm configured to vibrate with a mutually reverse phase to the pair of first vibration arms,
wherein each of the first and second vibration arms includes:
a silicon layer,
a first piezoelectric layer disposed above the silicon layer,
a first electrode disposed on the first piezoelectric layer on a side opposite the silicon layer,
a second piezoelectric layer disposed on the first electrode on a side opposite the first piezoelectric layer and having polarization in an opposite direction to a direction of polarization of the first piezoelectric layer, and
a second electrode disposed on the second piezoelectric layer on a side opposite the first electrode,
wherein the first electrode of each of the pair of first vibration arms and the second electrode of the at least one second vibration arm are electrically connected to each, and
wherein the second electrode of each of the first vibration arms and the first electrode of the at least one second vibration arm are electrically connected to each other.
18. The piezoelectric vibrator according to claim 17 , wherein the pair of first vibration arms and the at least one second vibration arm are configured to vibrate with mutually reverse phases in a vertical direction relative to a plane of a direction in which the vibration arms extend.
19. The piezoelectric vibrator according to claim 18 , wherein each of the pair of first vibration arms and the at least one second vibration arm further includes a third electrode disposed between the silicon layer and the first piezoelectric layer, the third electrode being a floating electrode.
20. The piezoelectric vibrator according to claim 18 , wherein each of the pair of first vibration arms and the at least one second vibration arm further includes an insulation layer comprising a silicon oxide.