Semiconductor device
A semiconductor device of an embodiment includes an SiC layer having a first and a second plane, an n-type first SiC region in the SiC layer, p-type second SiC regions between the first SiC region and the first plane, n-type third SiC regions between the second SiC regions and the first plane, a gate electrode provided between two p-type second SiC regions, a gate insulating film provided between the gate electrode and the second SiC regions, a metal layer provided between two p-type second SiC regions, and having a work function of 6.5 eV or more, and a first electrode electrically connected to the metal layer, and a second electrode, the SiC layer provided between the first electrode and the second electrode, and a part of the first SiC region is disposed between the gate insulating film and the metal layer.
1. A semiconductor device comprising:
an SiC layer having a first plane and a second plane, the SiC layer being 4H—SiC;
an n-type first SiC region provided in the SiC layer;
p-type second SiC regions provided in the SiC layer, the second SiC regions provided between the first SiC region and the first plane;
n-type third SiC regions provided in the SiC layer, the third SiC regions provided between the second SiC regions and the first plane;
a gate electrode provided between one of the second SiC regions and another one of the second SiC regions neighbouring the one of the second SiC regions;
a gate insulating film provided between the gate electrode and the one of the second SiC regions;
a metal layer provided between the one of the second SiC regions and an other one of the second SiC regions neighbouring the one of the second SiC regions, the one of the second SiC regions disposed between the another one of the second SiC regions and the other one of the second SiC regions, the metal layer having a work function of 6.5 eV or more, a part of the first SiC region is disposed between the gate insulating film and the metal layer, the metal layer being in physical contact with the part of the first SiC region;
a first electrode electrically connected to the metal layer, the metal layer provided between the first SiC region and the first electrode; and
a second electrode, the SiC layer provided between the first electrode and the second electrode.
2. The device according to claim 1 , wherein
the metal layer includes SiC having a concentration of a p-type impurity of 1×10 20 cm −3 or more.
3. The device according to claim 2 , wherein
the p-type impurity is at least one selected from aluminum (Al), gallium (Ga), and indium (In).
4. The device according to claim 2 , wherein
the metal layer includes 3C-SiC.
5. The device according to claim 1 , further comprising:
a junction between the metal layer and the first SiC region, the junction being a Schottky junction.
6. The device according to claim 1 , further comprising:
a p-type fourth SiC region provided between the metal layer and the one of the second SiC regions, the fourth SiC region having a higher p-type impurity concentration than the second SiC regions, the metal layer being in contact with the fourth SiC region.
7. The device according to claim 1 , further comprising:
a p-type fifth SiC region provided between the first SiC region and the metal layer.
8. The device according to claim 1 , wherein
a distance between the metal layer and the second plane is shorter than a distance between the gate insulating film and the second plane.
9. The device according to claim 1 , wherein
the gate electrode includes 3C-SiC containing at least one selected from aluminum (Al), gallium (Ga), and indium (In).
10. A semiconductor device comprising:
an SiC layer having a first plane and a second plane;
an n-type first SiC region provided in the SiC layer;
p-type second SiC regions provided in the SiC layer, the second SiC regions provided between the first SiC region and the first plane;
n-type third SiC regions provided in the SiC layer, the third SiC regions provided between the second SiC regions and the first plane;
a gate electrode provided between one of the second SiC regions and another one of the second SiC regions neighbouring the one of the second SiC regions;
a gate insulating film provided between the gate electrode and the one of the second SiC regions;
a metal layer provided between the one of the second SiC regions and an other one of the second SiC regions neighbouring the one of the second SiC regions, the one of the second SiC regions disposed between the another one of the second SiC regions and the other one of the second SiC regions, the metal layer having a work function of 6.5 eV or more, a part of the first SiC region is disposed between the gate insulating film and the metal layer, the metal layer being in contact with the part of the first SiC region;
a first electrode electrically connected to the metal layer, the metal layer provided between the first SiC region and the first electrode; and
a second electrode, the SiC layer provided between the first electrode and the second electrode, wherein
the gate electrode includes a first metal film and a second metal film, the first metal film is made of substantially same material as the metal layer, and the first metal film has an approximately same film thickness as the metal layer.
11. The device according to claim 10 , wherein
the metal layer includes SiC having a concentration of a p-type impurity of 1×10 20 cm −3 or more.
12. The device according to claim 11 , wherein
the p-type impurity is at least one selected from aluminum (Al), gallium (Ga), and indium (In).
13. The device according to claim 12 , wherein
the metal layer includes 3C-SiC.