Semiconductor processing system
The semiconductor processing system includes a reactor chamber that has an upper wall and a lower wall. A hold member is disposed in the reactor chamber to hold a semiconductor substrate in such a way that it faces the lower wall of the reactor chamber.
1. A method for processing a semiconductor substrate, the method comprising:
providing a reactor chamber comprising an upper wall and a lower wall and a hold member to hold a semiconductor substrate to be processed;
placing the semiconductor substrate onto the hold member in such a way that it faces the lower wall of the reactor chamber;
disposing a magnet outside the reactor chamber such that a pole of the magnet is facing an exposed surface of the semiconductor substrate to distract material fragments or particles released from the semiconductor substrate; and
processing the semiconductor substrate including taking away one or more of particles, defects and flakes that have fallen down from the semiconductor substrate due to gravitational or magnetic forces, by any sort of flowing process gas or plasma in the direction of an outlet opening.
2. The method according to claim 1 , further comprising:
feeding a process gas into the reactor chamber.
3. The method according to claim 1 , further comprising:
feeding a plasma gas into the reactor chamber.