Gate cut structure with liner spacer and related method
A gate cut structure for finFETs, and a related method, are disclosed. The gate cut structure separates and electrically isolates an end of a first metal gate conductor of a first finFET from an end of a second metal gate conductor of a second finFET. The gate cut structure includes a body contacting the end of the first and second metal gate conductors. A liner spacer separates a lower portion of the body from an interlayer dielectric (ILD), and an upper portion of the body contacts the ILD. During formation, the liner spacer allows for a larger gate cut opening to be used to allow quality cleaning of the gate cut opening, but also reduction in size of the spacing between metal gate conductor ends of the finFETs. In one example, the body may have a lower portion having a width less than an upper portion thereof.
1. A fin-type field effect transistor (finFET) structure, comprising:
a substrate;
a first finFET on the substrate, the first finFET having a first semiconductor fin and a first metal gate conductor over the first semiconductor fin;
a second finFET on the substrate, the second finFET having a second semiconductor fin and a second metal gate conductor over the second semiconductor fin;
an interlayer dielectric about the first finFET and the second finFET; and
a gate cut structure electrically isolating an end of the first metal gate conductor from an end of the second metal gate conductor to electrically isolate the first and second finFETs, wherein the gate cut structure includes a body and a liner spacer,
wherein the body has a lower portion and an upper portion,
wherein the upper portion of the body contacts the interlayer dielectric and the liner spacer separates the lower portion of the body from the interlayer dielectric.
2. The finFET structure of claim 1 , wherein the upper portion and the lower portion of the body contacts the end of the first metal gate conductor and the end of the second metal gate conductor.
3. The finFET structure of claim 1 , wherein the lower portion of the body has a width less than the upper portion of the body.
4. The finFET structure of claim 3 , wherein the lower portion has a width less than or equal to approximately 24 nanometers.
5. The finFET structure of claim 1 , wherein the liner spacer extends underneath the body.
6. The finFET structure of claim 1 , wherein the body has a cross-sectional T-shape.
7. A gate cut structure for fin-type field effect transistors (finFET), the gate cut structure comprising:
a gate cut structure electrically isolating an end of a first metal gate conductor of a first finFET from an end of a second metal gate conductor of a second finFET,
wherein the gate cut structure includes a body contacting the end of the first metal gate conductor and the end of the second metal gate conductor, and a liner spacer separating only a portion of the body from an interlayer dielectric extending about the first and second finFETs.
8. The gate cut structure of claim 7 , wherein the body has a lower portion and an upper portion, the lower portion having a width less than the upper portion.
9. The gate cut structure of claim 8 , wherein the upper portion of the body contacts the interlayer dielectric and the liner spacer separates the lower portion of the body from the interlayer dielectric.