Pressure sensor for recording a pressure of a fluid medium
A pressure sensor for recording a pressure of a fluid medium in a measuring cell. The pressure sensor includes a sensor housing, at least one first pressure sensor element for measuring a pressure of the medium, and a drive and/or evaluation circuit for outputting a signal indicative of a pressure acting on the first pressure sensor element. The drive and/or evaluation circuit is configured on or in a circuit substrate disposed within the sensor housing. The first pressure sensor element is configured on or in the circuit substrate and is separated from the fluid medium by at least one first separating membrane.
1. A pressure sensor for recording a pressure of a fluid medium, comprising:
a sensor housing;
at least one first pressure sensor element for measuring a pressure of the medium; and
at least one of a drive and evaluation circuit, the at least one of the drive and evaluation circuit for outputting a signal indicative of a pressure acting on the first pressure sensor element, the at least one of the drive and evaluation circuit being configured on or in a circuit substrate disposed within the sensor housing;
wherein the first pressure sensor element is configured on or in the circuit substrate and is separated from the fluid medium by at least one first separating membrane,
wherein the first pressure sensor element is configured in a sensor element cell in the circuit substrate,
wherein the sensor element cell is filled with a transmission medium,
wherein the sensor element cell is sealed by a sealing element.
2. The pressure sensor as recited in claim 1 , wherein the first pressure sensor element is spaced apart from first separating membrane.
3. The pressure sensor as recited in claim 1 , further comprising:
a transmission cell configured between the first pressure sensor element and the first separating membrane, the transmission cell being filled with a transmission medium that is suited for transmitting a pressure of the fluid medium acting on the first separating membrane to the first pressure sensor element.
4. The pressure sensor as recited in claim 3 , wherein the transmission medium is a liquid, the liquid being oil.
5. The pressure sensor as recited in claim 1 , wherein the sensor element cell is separated from an interior space of the sensor housing by a second separating membrane.
6. The pressure sensor as recited in claim 5 , wherein the second separating membrane is configured for applying a counterpressure, and the transmission medium in the sensor element cell is suited for transmitting a counterpressure acting on the second separating membrane to the first sensor element.
7. The pressure sensor as recited in claim 1 , wherein at least one second pressure sensor element is on or in the circuit substrate, and is designed for measuring a counterpressure applied to the first separating membrane.