Spectroscopic sensor device and electronic equipment
A spectroscopic sensor that applies lights in a wavelength band containing plural wavelengths to an object and spectroscopically separates reflected lights or transmitted lights from the object using plural light band-pass filters that transmit the respective specific wavelengths and plural photosensor parts to which corresponding transmitted lights are input based on output results of independent photosensors. The spectroscopic sensor may be integrated in a semiconductor device or module by integration using a semiconductor process and downsizing may be realized.
1. A pulsimeter comprising:
a light source unit that transmits light to a body of a user; and
a spectroscopic sensor that receives incident light from the light source unit reflected from or transmitted through the body of the user,
the spectroscopic sensor including:
a photosensor that has an impurity area formed on a semiconductor substrate, and
an angle limiting filter that includes a plurality of light blocking materials which have electrical conductivity, at least one of the light blocking materials being disposed directly on and contacting the impurity area.
2. The pulsimeter of claim 1 , wherein
the light blocking material includes a light absorbing material.
3. The pulsimeter of claim 1 , wherein
the light blocking material is formed by a conducting plug provided in an insulating material disposed on the semiconductor substrate.
4. The pulsimeter of claim 3 , wherein
the conducting plug is formed in a contact hole provided in the insulating material.
5. The pulsimeter of claim 1 , wherein
the light blocking material is comprised of tungsten or titanium nitride.
6. The pulsimeter of claim 1 , wherein
the plurality of light blocking materials is formed in lattice form in a plan view.
7. The pulsimeter of claim 1 , wherein
the angle limiting filter transmits an electrical signal from the impurity region.
8. The pulsimeter of claim 1 , wherein
the angle limiting filter is an electrode of the spectroscopic sensor.
9. The pulsimeter of claim 1 , wherein
the plurality of light blocking materials is disposed directly on and contacting the impurity area.
10. A spectroscopic sensor comprising:
a light source unit that transmits light to a body of a user; and
a photo sensor that detects incident light from the light source unit reflected from or transmitted through the body of the user,
the photo sensor comprising:
an impurity area formed on a semiconductor substrate, and
an angle limiting filter that is formed by a plurality of light blocking materials which have electrical conductivity, at least one of the light blocking materials being disposed directly on and contacting the impurity area.
11. The spectroscopic sensor of claim 10 , wherein
the light blocking material includes a light absorbing material.
12. The spectroscopic sensor of claim 10 , wherein
the light blocking material is formed by a conducting plug provided in an insulating material disposed on the semiconductor substrate.
13. The spectroscopic sensor of claim 12 , wherein
the conducting plug is formed in a contact hole provided in the insulating material.
14. The spectroscopic sensor of claim 10 , wherein
the light blocking material is comprised of tungsten or titanium nitride.
15. The spectroscopic sensor of claim 10 , wherein
the plurality of light blocking materials is formed in lattice form in a plan view.
16. The spectroscopic sensor of claim 10 , wherein
the angle limiting filter transmits an electrical signal from the impurity region.
17. The spectroscopic sensor of claim 10 , wherein
the angle limiting filter is an electrode of the photo sensor.
18. The spectroscopic sensor of claim 10 , wherein
the plurality of light blocking materials is disposed directly on and contacting the impurity area.