IP Library Granted Patent US 10,241,088
Granted Patent B2
US 10,241,088 · App. 15/136,469 · Granted Mar 26, 2019

Photo-acoustic gas sensor module having light emitter and detector units

Inventors: Horst Theuss (Wenzenbach, DE); Gottfried Beer (Nittendorf, DE); Sebastian Beer (Regensburg, DE); Alfons Dehe (Reutlingen, DE); Franz Jost (Stuttgart, DE); Stefan Kolb (Unterschleissheim, DE); Guenther Ruhl (Regensburg, DE); Rainer Markus Schaller (Saal a.d. Donau, DE)
Assignee: Infineon Technologies AG
G01N29/2425G01N29/032G01N2291/021
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Quick Facts
Patent No.
US 10,241,088
App. No.
15/136,469
Granted
Mar 26, 2019
Kind
B2
Abstract

A photo-acoustic gas sensor includes a light emitter unit having a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and a wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit having a microphone. The light emitter unit is arranged so that the beam of light pulses traverses an area configured to accommodate the gas. The detector unit is arranged so that the microphone can receive a signal oscillating with the repetition frequency.

Claims (18)

1. A photo-acoustic gas sensor, comprising:

a light emitter unit comprising a stationary light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and a wavelength corresponding to an absorption band of a gas to be sensed; and

a single detector unit comprising a microphone,

wherein the light emitter unit is arranged so that the beam of light pulses traverses an area configured to accommodate the gas and the single detector unit is arranged so that the microphone can receive a signal oscillating with the repetition frequency,

wherein the detector unit is disposed on a first substrate within a hermetically sealed chamber, wherein the hermetically sealed chamber comprises a light entrance window opposite from the first substrate and a reference gas within the hermetically sealed chamber, and

wherein the light emitter unit is disposed on a second substrate that is outside of the hermetically sealed chamber and is arranged face-to-face with the first substrate.

2. The photo-acoustic gas sensor of claim 1 , wherein the reference gas is of the same species as the gas to be sensed.

3. The photo-acoustic gas sensor of claim 1 , wherein the repetition frequency lies within an audio frequency range.

4. The photo-acoustic gas sensor of claim 1 , wherein the stationary light emitter comprises one or more of a blackbody radiator, a lamp, a resistor, a diode, and a laser.

5. The photo-acoustic gas sensor of claim 1 , wherein the light emitter unit has a tunable wavelength emission range.

6. The photo-acoustic gas sensor of claim 1 , wherein the gas to be sensed is one of CO 2 , NO x , H 2 O, O 2 , N 2 , CH 4 and alcohol.

7. A photo-acoustic gas sensor module, comprising:

a stationary light emitter configured to emit a beam of light pulses to be absorbed by a gas; and

a single microphone configured to receive a signal oscillating with a repetition frequency of the light pulses,

wherein the detector unit is disposed on a first substrate within a hermetically sealed chamber, wherein the hermetically sealed chamber comprises a light entrance window opposite from the first substrate and a reference gas within the hermetically sealed chamber, and

wherein the microphone is disposed on a second substrate that is outside of the hermetically sealed chamber and is arranged face-to-face with the first substrate.

8. The photo-acoustic gas sensor module of claim 7 , wherein the photo-acoustic gas sensor module is configured as a surface mount device.

9. The photo-acoustic gas sensor module of claim 7 , wherein the stationary light emitter is configured to emit infrared light of a wavelength corresponding to an energy of a rotational or vibrational band of a molecule of the gas.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 1, 2016
From: DEHE, ALFONS; JOST, FRANZ; BEER, GOTTFRIED; RUHL, GUENTHER; THEUSS, HORST; SCHALLER, RAINER MARKUS; BEER, SEBASTIAN; KOLB, STEFAN
To: INFINEON TECHNOLOGIES AG
Reel/Frame 038760/0004 →
Priority Claims (1)
DE 10 2015 106 373 · Apr 24, 2015 · national
Continuity (1)
Related Publication 20160313288A1 · Oct 27, 2016
Cited By (3)
US 12,228,551 US 12,379,243 US 12,399,153