Utilizing multilayer gate spacer to reduce erosion of semiconductor fin during spacer patterning
FinFET devices comprising multilayer gate spacers are provided, as well as methods for fabricating FinFET devices in which multilayer gate spacers are utilized to prevent or otherwise minimize the erosion of vertical semiconductor fins when forming the gate spacers. For example, a method for fabricating a semiconductor device comprises forming a dummy gate structure over a portion of a vertical semiconductor fin of a FinFET device, and forming a multilayer gate spacer on the dummy gate structure. The multilayer gate spacer comprises a first dielectric layer and a second dielectric layer, wherein the first dielectric layer has etch selectivity with respect to the vertical semiconductor fin and the second dielectric layer. In one embodiment, the first dielectric layer comprises silicon oxycarbonitride (SiOCN) and the second dielectric layer comprises silicon boron carbon nitride (SiBCN).
1. A method for fabricating a semiconductor device, comprising:
forming a dummy gate structure over a portion of a vertical semiconductor fin of a FinFET (field effect transistor) device; and
forming a multilayer gate spacer on the dummy gate structure;
wherein the multilayer gate spacer comprises a first dielectric layer and a second dielectric layer; and
wherein forming the multilayer gate spacer on the dummy gate structure comprises:
depositing a first conformal layer of dielectric material over the dummy gate structure and portions of the vertical semiconductor fin which extend from sidewalls of the dummy gate structure;
depositing a second conformal layer of dielectric material over the first conformal layer of dielectric material;
performing a first etch process to etch the second conformal layer of dielectric material selective to the first conformal layer of dielectric material to form the second dielectric layer of the multilayer gate spacer, wherein the first etch process results in (i) removing portions of the second conformal layer of dielectric material covering the portions of the vertical semiconductor fin which extend from sidewalls of the dummy gate structure and (ii) recessing vertical portions of the second conformal layer of dielectric material on vertical sidewalls of the dummy gate structure such that entire upper surfaces of the vertical portions of the second conformal layer of dielectric material are recessed below an upper surface of the first conformal layer of dielectric material as a result of the first etch process; and
performing a second etch process to etch the first conformal layer of dielectric material selective to both the vertical semiconductor fin and the second dielectric layer to form the first dielectric layer of the multilayer gate spacer, wherein the second etch process results in removing portions of the first conformal layer of dielectric material not covered by the second dielectric layer of the multilayer gate spacer.
2. The method of claim 1 , wherein the first dielectric layer comprises silicon oxycarbonitride (SiOCN).
3. The method of claim 2 , wherein the first dielectric layer has a thickness in a range of about 2 nm to about 5 nm.
4. The method of claim 2 , wherein the second dielectric layer comprises silicon boron carbon nitride (SiBCN).
5. The method of claim 4 , wherein the second dielectric layer has a thickness in A range of about 5 nm to about 20 nm.
6. The method of claim 1 , further comprising epitaxially growing a layer of epitaxial semiconductor material on exposed portions of the vertical semiconductor fin which extend from sidewalls of the dummy gate structure.
7. The method of claim 6 , further comprising removing the dummy gate structure, and forming a metallic gate structure in place of the dummy gate structure.
8. The method of claim 7 , wherein the metallic gate structure comprises a high-k metal gate structure.
9. A method for fabricating a semiconductor device, comprising:
forming a dummy gate structure over a portion of a vertical semiconductor fin of a FinFET (field effect transistor) device; and
forming a multilayer gate spacer on the dummy gate structure;
wherein the multilayer gate spacer comprises a first dielectric layer and a second dielectric layer; and
wherein forming the multilayer gate spacer on the dummy gate structure comprises:
depositing a first conformal layer of dielectric material over the dummy gate structure and portions of the vertical semiconductor fin which extend from sidewalls of the dummy gate structure;
depositing a second conformal layer of dielectric material over the first conformal layer of dielectric material;
performing a first etch process to etch the second conformal layer of dielectric material selective to the first conformal layer of dielectric material to form the second dielectric layer of the multilayer gate spacer wherein the first etch process results in entire upper surfaces of vertical portions of the second dielectric layer being recessed below an upper surface of the first conformal layer of dielectric material; and
performing a second etch process to etch the first conformal layer of dielectric material selective to both the vertical semiconductor fin and the second dielectric layer to form the first dielectric layer of the multilayer gate spacer.
10. The method of claim 9 , wherein the first dielectric layer comprises silicon oxycarbonitride (SiOCN).
11. The method of claim 10 , wherein the first dielectric layer has a thickness in a range of about 2 nm to about 5 nm.
12. The method of claim 10 , wherein the second dielectric layer comprises silicon boron carbon nitride (SiBCN).
13. The method of claim 12 , wherein the second dielectric layer has a thickness in
A range of about 5 nm to about 20 nm.
14. The method of claim 9 , further comprising epitaxially growing a layer of epitaxial semiconductor material on exposed portions of the vertical semiconductor fin which extend from sidewalls of the dummy gate structure.
15. The method of claim 14 , further comprising removing the dummy gate structure, and forming a metallic gate structure in place of the dummy gate structure.
16. The method of claim 15 , wherein the metallic gate structure comprises a high-k metal gate structure.