Structure for radiofrequency applications
A structure for radiofrequency applications includes: a semiconducting supporting substrate, and a trapping layer arranged on the supporting substrate. The trapping layer includes a higher defect density than a predetermined defect density. The predetermined defect density is the defect density beyond which the electric resistivity of the trapping layer is no lower than 10,000 ohm·cm over a temperature range extending from −20° C. to 120° C.
1. A structure for radiofrequency applications, comprising:
a semiconducting supporting substrate; and
a trapping layer arranged on the supporting substrate, the trapping layer comprising polycrystalline silicon including 1% to 20% of carbon;
wherein the trapping layer comprises a defect density greater than a predetermined defect density, the predetermined defect density being the defect density for which the electrical resistivity of the trapping layer is greater than or equal to 10,000 ohm·cm over a temperature range extending from −20° C. to 120° C.
2. The structure for radiofrequency applications according to claim 1 , wherein the trapping layer has a resistivity, at 20° C., of greater than 10,000 ohm·cm.
3. The structure for radiofrequency applications according to claim 2 , wherein the trapping layer has a resistivity, at 20° C., of greater than 50,000 ohm·cm.
4. The structure for radiofrequency applications according to claim 1 , wherein a difference in thermal expansion coefficient between the trapping layer and the supporting substrate is less than 5 ppm/K between 100° C. and 1200° C.
5. The structure for radiofrequency applications according to claim 1 , wherein the trapping layer comprises microstructures of a size smaller than 20 nm.
6. The structure for radiofrequency applications according to claim 1 , wherein the trapping layer comprises a porous or polycrystalline material.
7. The structure for radiofrequency applications according to claim 1 , wherein a thickness of the trapping layer is between 10 μm and 50 μm.
8. The structure for radiofrequency applications according to claim 1 , wherein the supporting substrate comprises at least one material selected from the group consisting of: silicon, silicon germanium, and silicon carbide.
9. The structure for radiofrequency applications according to claim 1 , wherein a resistivity of the supporting substrate is between 10 ohm·cm and 2000 ohm·cm.
10. The structure for radiofrequency applications according to claim 1 , wherein an active layer is disposed on the trapping layer.
11. The structure for radiofrequency applications according to claim 10 , wherein the active layer comprises a semiconductor material.
12. The structure for radiofrequency applications according to claim 10 , wherein the active layer comprises a piezoelectric material.
13. The structure for radiofrequency applications according to claim 10 , wherein a thickness of the active layer is between 10 μm and 50 μm.
14. The structure for radiofrequency applications according to claim 10 , wherein a dielectric layer is disposed between the trapping layer and the active layer.
15. The structure for radiofrequency applications according to claim 14 , wherein the dielectric layer has a thickness between 10 nm and 6 μm.
16. The structure for radiofrequency applications according to claim 10 , further comprising at least one microelectronic device on or in the active layer, wherein the at least one microelectronic device comprises a switching circuit, an antenna adaptation circuit, or a radiofrequency power amplification circuit.
17. The structure for radiofrequency applications according to claim 10 , further comprising at least one microelectronic device on or in the active layer, wherein the at least one microelectronic device comprises a plurality of active components and a plurality of passive components.
18. The structure for radiofrequency applications according to claim 10 , further comprising at least one microelectronic device on or in the active layer, wherein the at least one microelectronic device comprises at least one control element and one MEMS switching element comprising an ohmic-contact microswitch or a capacitive microswitch.
19. The structure for radiofrequency applications according to claim 10 , further comprising at least one microelectronic device on or in the active layer, wherein the at least one microelectronic device comprises a radiofrequency filter operating by volume or surface sound wave propagation.