Package structure of MEMS microphone
The present invention discloses a package structure of a MEMS microphone. The package structure comprises a closed inner cavity formed by a package shell in a surrounding manner, as well as a MEMS chip and an ASIC chip which are located in the closed inner cavity, wherein a sound hole allowing sound to flow into the closed inner cavity is formed in the package shell; the MEMS chip comprises a substrate as well as a vibrating diaphragm and a back plate which are provided on the substrate; the vibrating diaphragm divides the closed inner cavity into a front cavity and a back cavity; and a sound-absorbing structure is provided in the back cavity.
1. A package structure of a MEMS microphone, the package structure comprising a closed inner cavity formed by a package shell, as well as a MEMS chip and an ASIC chip which are located in the closed inner cavity, wherein a sound hole allowing sound to flow into the closed inner cavity is formed on the package shell; the MEMS chip comprises a substrate as well as a vibrating diaphragm and a back plate which are provided on the substrate; the vibrating diaphragm are provided with a plurality of air guide holes and divides the closed inner cavity into a front cavity and a back cavity; and a sound-absorbing structure is provided in the back cavity,
wherein the package shell comprises a package substrate and a package housing provided on the package substrate; the MEMS chip is mounted on the package substrate through its substrate; and the vibrating diaphragm, the substrate and the package substrate together form the back cavity in a surrounding manner, and the package substrate is provided with a groove in which the sound-absorbing structure is arranged.
2. The package structure according to claim 1 , wherein the sound-absorbing structure is arranged on a side wall of the substrate.
3. The package structure according to claim 2 , wherein the sound-absorbing structure is a sound-absorbing film layer.
4. The package structure according to claim 3 , wherein the sound-absorbing film layer is made of polyimide.
5. The package structure according to claim 2 , wherein the sound-absorbing structure is of a microplate structure.
6. The package structure according to claim 5 , wherein the microplate structure ( 8 ) comprises at least two layers of microporous sound-absorbing plates laminated together.
7. The package structure according to claim 6 , wherein micropores on the at least two layers of microporous sound-absorbing plates are distributed in a staggered manner.