Semiconductor pressure sensor
A semiconductor pressure sensor of the invention, includes: a base body ( 1 ) including: a lead frame ( 4 ) having a first surface and a second surface; and a support ( 5 ) that supports the lead frame ( 4 ) and is made of a resin; a pressure sensor chip ( 2 ) provided on the first surface of the lead frame ( 4 ); and a controller ( 3 ) that is provided on the second surface of the lead frame ( 4 ), is implanted in the support ( 5 ), is formed in the shape having a plurality of surfaces, includes a stress relief layer ( 32, 33, 34, 35, 36 ) that is formed on at least one of the plurality of surfaces and has a Young's modulus lower than that of the support ( 5 ), and receives a sensor signal output from the pressure sensor chip ( 2 ) aid thereby outputs a pressure detection, the pressure sensor chip ( 2 ) at least partially overlapping the controller ( 3 ) in plan view.
1. A semiconductor pressure sensor comprising:
a base body comprising: a lead frame having a first surface and a second surface; and a support that supports the lead frame and is made of a resin;
a pressure sensor chip provided on the first surface of the lead frame; and
a controller that is provided on the second surface of the lead frame, is implanted in the support, is formed in a shape having a plurality of surfaces, and receives a sensor signal output from the pressure sensor chip and thereby outputs a pressure detection, the pressure sensor chip at least partially overlapping the controller in plan view, wherein
the support comprises: a base; and a mounting portion on which the pressure sensor chip is mounted, and
the mounting portion is formed of a material having a hardness lower than a material used to form the base.
2. The semiconductor pressure sensor according to claim 1 , further comprising:
a stress relief layer that is formed by use of one material, formed on the plurality of surfaces of the controller so as to cover an entire surface of the controller, and has a Young's modulus lower than that of the support.
3. The semiconductor pressure sensor according to claim 1 , wherein
a surface area of the pressure sensor chip is substantially the same as that of the controller in plan view, and a shape of the pressure sensor chip is substantially the same as that of the controller in plan view, and
the pressure sensor chip and the controller are disposed such that each of the surface areas of the pressure sensor chip and the controller is substantially the same as a surface area of a region on which the controller overlaps the pressure sensor chip in plan view.
4. The semiconductor pressure sensor according to claim 2 , wherein the stress relief layer has an external surface forming a curved convex surface.
5. The semiconductor pressure sensor according to claim 2 , wherein the Young's modulus of the stress relief layer is less than or equal to 1/10 of a Young's modulus of the support.
6. The semiconductor pressure sensor according to claim 1 , wherein
each of the pressure sensor chip and the controller is connected to the lead frame via a bonding wire.
7. The semiconductor pressure sensor according to claim 1 , wherein
a container that accommodates the pressure sensor chip therein is formed on the base,
the container is filled with a protective material that covers the pressure sensor chip, and
the protective material is capable of transmitting, to the pressure sensor chip, a pressure applied from a measurement object.
8. The semiconductor pressure sensor according to claim 1 , wherein
the lead frame is implanted in the support.
9. The semiconductor pressure sensor according to claim 1 , wherein
in a development view showing the pressure sensor chip and the controller, the controller contains the entirety of the pressure sensor chip.