Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device may include forming a first stack structure by alternately stacking first material layers and second material layers, forming first holes penetrating the first stack structure and a first slit located between the first holes, forming channel patterns in the first holes and a dummy channel pattern in the first slit, selectively removing the dummy channel pattern from the first slit, and replacing the first material layers with third material layers through the first slit.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a first stack structure by alternately stacking first material layers and second material layers;
forming first holes and a first slit, the first holes penetrating the first stack structure, the first slit being located between the first holes;
forming channel patterns in the first holes and a dummy channel pattern in the first slit;
selectively removing the dummy channel pattern from the first slit; and
replacing the first material layers with third material layers through the first slit.
2. The method of claim 1 , wherein forming the first holes and the first slit includes:
forming, on the first stack structure, a mask pattern including openings distributed at a uniform distance from one another; and
forming the first holes and the first slit by etching the first stack structure using the mask pattern as an etch barrier.
3. The method of claim 2 , wherein the first holes and the first slit are formed in a way that a thickness of the mask pattern is uniformly decreased.
4. The method of claim 1 , wherein the first slit has a line shape extending in one direction and exposes all of the first material layers therethrough.
5. The method of claim 1 , wherein selectively removing the dummy channel pattern includes:
forming a mask pattern on the first stack structure, the mask pattern covering the first holes and the channel patterns and exposing the first slit and the dummy channel pattern therethrough; and
removing the dummy channel pattern from the first slit exposed through the mask pattern.
6. The method of claim 1 , wherein the dummy channel pattern is formed together with the channel pattern when the channel pattern is formed.
7. The method of claim 1 , further comprising forming memory patterns in the first holes and a dummy memory pattern in the first slit.
8. The method of claim 7 , further comprising selectively removing the dummy memory pattern.
9. The method of claim 8 , wherein the dummy channel pattern is etched using a wet etching process, and the dummy memory pattern is etched using a wet or dry etching process.
10. The method of claim 1 , further comprising:
forming memory patterns in the first holes and a dummy memory pattern in the first slit;
forming an insulating layer on the first stack structure;
forming a first opening passing through the insulating layer, covering the channel patterns and the memory patterns, and exposing the dummy channel pattern;
forming a second opening by selectively removing the dummy channel pattern through the first opening; and
selectively removing the dummy memory pattern through the first and second openings.
11. The method of claim 1 , further comprising, after replacing the first material layers with the third material layers, forming a slit insulating layer in the first slit.
12. The method of claim 1 , wherein the first material layers include a sacrificial material, the second material layers include an insulating material, and the third material layers include a conductive material.
13. The method of claim 1 , further comprising:
forming a second stack structure on the first stack structure after forming the first holes and the first slit, the second stack structure including fourth material layers and fifth material layers which are alternately stacked; and
forming second holes and a second slit, the second holes penetrating the second stack structure and being connected to the first holes, the second slit penetrating the second stack structure and being connected to the first slit.
14. The method of claim 13 , wherein the channel patterns are formed in the first and second holes, and the dummy channel pattern is formed in the first and second slits.
15. The method of claim 14 , further comprising, after the dummy channel pattern is selectively removed, performing an etch-back process such that the first slit and the second slit have a uniform width.
16. A method of manufacturing a semiconductor device, the method comprising:
forming a first stack structure by alternately stacking first sacrificial layers and the first insulating layers;
forming first holes and a first slit, the first holes penetrating the first stack structure, the first slit being located between the first holes;
forming, on the first stack structure, a second stack structure by alternately stacking second sacrificial layers and second insulating layers;
forming second holes and a second slit, the second holes penetrating the second stack structure and being connected to the first holes, the second slit penetrating the second stack structure and being connected to the first slit;
forming channel patterns in the first and second holes and a dummy channel pattern in the first and second slits;
selectively removing the dummy channel pattern; and
replacing the first and second sacrificial layers with conductive layers through the first and second slits.
17. The method of claim 16 , wherein forming the first holes and the first slit includes:
forming a mask pattern on the first stack structure, the mask pattern includes openings distributed at a uniform distance from one another; and
forming the first holes and the first slit by etching the first stack structure using the mask pattern as an etch barrier.
18. The method of claim 17 , wherein the first holes and the first slit are formed in a way that a thickness of the mask pattern is uniformly decreased.
19. The method of claim 16 , wherein forming the second holes and the second slit includes:
forming a mask pattern on the second stack structure, the mask pattern including openings distributed at a uniform distance from one another; and
forming the second holes and the second slit by etching the second stack structure using the mask pattern as an etch barrier.
20. A method of manufacturing a semiconductor device, the method comprising:
forming a structure by alternately stacking first material layers and second material layers;
forming holes and a slit using a same mask pattern, the holes penetrating the stack structure, the slit being located between the holes;
forming channel patterns in the holes and a dummy channel pattern in the slit, wherein the dummy channel pattern is formed when the channel patterns are formed;
selectively removing the dummy channel pattern from the slit; and
replacing the first material layers with third material layers through the slit.