Acoustic resonator and method of manufacturing the same
An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonance part including a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes; and a substrate disposed below the resonance part. The piezoelectric layer is disposed on a flat surface of the first electrode.
1. An acoustic resonator comprising:
a resonance part comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, wherein the resonance part is disposed on a membrane layer;
a substrate disposed below the resonance part; and
a space enclosed by the piezoelectric layer, the first electrode, the second electrode and the membrane layer;
wherein the piezoelectric layer is entirely disposed on a flat surface of the first electrode.
2. The acoustic resonator of claim 1 , wherein an area of the piezoelectric layer is smaller than that of the flat surface of the first electrode.
3. The acoustic resonator of claim 1 , wherein the space provides a separation between the first electrode and the second electrode.
4. The acoustic resonator of claim 1 , wherein the space comprises an air cavity that separates the first electrode from the second electrode.
5. The acoustic resonator of claim 1 , wherein the space is filled with an insulating material.
6. The acoustic resonator of claim 5 , wherein the insulating material comprises at least one selected from the group consisting of SiO 2 , silicon, Si 3 N 4 , and AlN.
7. The acoustic resonator of claim 1 , further comprising at least one frame structure protruding outwardly from the second electrode.
8. The acoustic resonator of claim 1 , wherein the membrane layer enclosing the space faces the second electrode enclosing the space.
9. An acoustic resonator comprising:
a resonance part comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes, wherein the resonance part is disposed on a membrane layer;
a substrate disposed below the resonance part; and
a space enclosed by the piezoelectric layer, the first electrode, the second electrode and the membrane layer;
wherein the first electrode comprises a first flat surface within the resonance part, a second flat surface outside the resonance part, and an inclined surface connecting the first flat surface and the second flat surface, and
wherein the piezoelectric layer is entirely disposed on the first flat surface of the first electrode.