Liquid ejection head and method of manufacturing liquid ejection head
Liquid ejection head includes a substrate, a piezoelectric element provided on the substrate, an ejection port forming member provided on the substrate carrying the piezoelectric element. The ejection port forming member has an ejection port and forms a pressure chamber with the substrate. A first thin film is arranged between the substrate and the piezoelectric element to produce a space between the substrate and the first thin film. A second thin film is arranged on the piezoelectric element. The first thin film is arranged so as not to contact the lateral (edge) surface of the piezoelectric element and has a higher rigidity than the second thin film.
1. A liquid ejection head comprising:
a substrate;
a piezoelectric element provided on the substrate;
an ejection port forming member having an ejection port for ejecting liquid, the ejection port forming member being provided on the substrate carrying the piezoelectric element such that a pressure chamber is formed between the ejection port forming member and the substrate to contain the piezoelectric element therein and be held in communication with the ejection port;
a first thin film arranged between the substrate and the piezoelectric element such that a space is formed between the substrate and the first thin film; and
a second thin film arranged on the piezoelectric element such that the piezoelectric element is sandwiched between the first thin film and the second thin film,
wherein the piezoelectric element has a lateral surface, and the first thin film is not in contact with the lateral surface,
the second thin film is in contact with the lateral surface of the piezoelectric element, and
wherein the first thin film has a first rigidity and the second thin film has a second rigidity, the first rigidity being higher than the second rigidity.
2. The liquid ejection head according to claim 1 , wherein the first thin film is made of a material having a first Young's modulus and the second thin film is made of a material having a second Young's modulus, the first Young's modulus being higher than the second Young's modulus.
3. The liquid ejection head according to claim 1 , wherein the first thin film has a first film thickness and the second thin film has a second film thickness, the first film thickness being greater than the second film thickness.
4. The liquid ejection head according to claim 1 , wherein at least either the first thin film or the second thin film is a multilayer film.
5. The liquid ejection head according to claim 1 , wherein the ejection port forming member includes a first member made of a resin material forming the pressure chamber and a second member made of an inorganic material forming the ejection port.
6. The liquid ejection head according to claim 1 , wherein the ejection port forming member is made of an inorganic material.
7. A liquid ejection head comprising:
a substrate;
a piezoelectric element; and
an ejection port forming member having an ejection port arranged in this order,
wherein the liquid ejection head has a pressure chamber formed as a space between the substrate and the ejection port forming member,
wherein a first thin film and a second thin film are arranged such that the first thin film covers a first surface of the piezoelectric element, which faces the substrate, and the second thin film covers a second surface of the piezoelectric element, which faces the pressure chamber, and
wherein the second thin film also covers a lateral surface of the piezoelectric element.
8. The liquid ejection head according to claim 7 , wherein a rigidity of the first thin film is greater than a rigidity of the second thin film.
9. The liquid ejection head according to claim 8 , wherein the rigidity of the first thin film and the rigidity of the second thin film are represented by values of Young's modulus.
10. The liquid ejection head according to claim 7 , wherein a film thickness of the first thin film is greater than a film thickness of the second thin film.
11. The liquid ejection head according to claim 7 , wherein the liquid ejection head has a space between the substrate and the first thin film.
12. The liquid ejection head according to claim 7 , wherein at least either the first thin film or the second thin film is a multilayer film.
13. The liquid ejection head according to claim 7 , wherein the ejection port forming member includes a first member made of a resin material forming the pressure chamber and a second member made of an inorganic material forming the ejection port.
14. The liquid ejection head according to claim 7 , wherein the ejection port forming member is made of an inorganic material.