Integrated structure of MEMS microphone and pressure sensor and manufacturing method for the integrated structure
The present invention discloses a manufacturing method of an integrated structure of a MEMS microphone and a pressure sensor, which comprises the following steps: depositing an insulating layer, a first polycrystalline silicon layer, a sacrificial layer and a second polycrystalline silicon layer in sequence on a shared substrate; etching the second polycrystalline silicon layer to form a vibrating diaphragm and an upper electrode; eroding the sacrificial layer to form a containing cavity of a microphone and a pressure sensor, and etching the sacrificial layer between the microphone and the pressure sensor; etching the first polycrystalline silicon layer to form a back electrode of the microphone and a lower electrode of the pressure sensor; etching a position of the shared substrate below a back electrode of the microphone to form a back cavity; and etching away the region of the insulating layer below the back electrode. A capacitance structure of a MEMS microphone and that of a pressure sensor are integrated on a shared substrate, improving integration of a MEMS microphone and a pressure sensor, and greatly reducing a size of a whole packaging structure; in addition, a microphone and a pressure sensor can be simultaneously manufactured on a shared substrate to improve the efficiency of production.
1. A manufacturing method for an integrated structure of a MEMS microphone and a pressure sensor, comprising the following steps:
a) depositing an insulating layer and a first polycrystalline silicon layer in sequence on a shared substrate;
b) depositing a sacrificial layer and a second polycrystalline silicon layer continuously in sequence above the first polycrystalline silicon layer;
c) etching the second polycrystalline silicon layer to form a vibrating diaphragm of a MEMS microphone and an upper electrode of the pressure sensor;
d) eroding the sacrificial layer to form a containing cavity of a MEMS microphone and a pressure sensor, and eroding the sacrificial layer between the MEMS microphone and the pressure sensor;
e) etching the first polycrystalline silicon layer to form a back electrode of the MEMS microphone and a lower electrode of the pressure sensor;
f) etching a position of the shared substrate below the back electrode of the MEMS microphone to form a back cavity; and
g) etching away the region of the insulating layer below the back electrode.
2. The manufacturing method according to claim 1 , in the step c), further comprising, a step of etching the second polycrystalline silicon layer to form a corrosion hole for corrosion material to penetrate through, wherein the corrosion hole is on the vibrating diaphragm and the upper electrode; and between the step d) and the step e), further comprising, a step of depositing a polycrystalline silicon thin film on the vibrating diaphragm and the upper electrode continuously to form a flange on the corrosion hole, wherein the flange is located on lower end of the vibrating diaphragm and the upper electrode.
3. The manufacturing method according to claim 2 , further comprising, after forming the flange, a step of thinning the vibrating diaphragm.
4. The manufacturing method according to claim 1 , wherein the step d) further comprises a step of eroding the sacrificial layer to form a through hole penetrating through the vibrating diaphragm and the first polycrystalline silicon layer, as well as the upper electrode and the first polycrystalline silicon layer respectively; and further comprises a step of manufacturing a metal part in the through hole to lead out an electric signal of the first polycrystalline silicon layer.
5. The manufacturing method according to claim 1 , wherein in the step g), an airflow leading-out hole is etched to form on the back electrode and the insulating layer below the back electrode at first, and then a region of the insulating layer below the back electrode is etched away.
6. An integrated structure of a MEMS microphone and a pressure sensor, the integrated structure comprising: a shared substrate, wherein a vibrating diaphragm and a back electrode forming a MEME microphone, as well as a sacrificial layer supporting between the vibrating diaphragm and the back electrode are disposed on the shared substrate; an upper electrode and a lower electrode forming the pressure sensor, as well as a sacrificial layer supporting between the upper electrode and the lower electrode are further disposed on the shared substrate; a position of the shared substrate corresponding to the back electrode is provided with a back cavity; and the back electrode is suspended above the back cavity.
7. The integrated structure according to claim 6 , wherein an insulating layer is provided at a position where shared substrate and the back electrode contact with the lower electrode.
8. The integrated structure according to claim 6 , wherein the sacrificial layer of the MEME microphone and pressure sensor is provided with a through hole penetrating through the back electrode and the vibrating diaphragm, as well as the lower electrode and the upper electrode respectively; and a metal part for leading out electric signal of the back electrode and lower electrode is disposed in the through hole.
9. The integrated structure according to claim 6 , wherein a plurality of flanges extending to the back electrode is disposed on a end face at one side of the vibrating diaphragm adjacent to the back electrode; and a plurality of flanges extending to the lower electrode is disposed on a end face at one side of the upper electrode adjacent to the lower electrode.
10. The integrated structure according to claim 6 , wherein the flange is inverted cone-shaped.